A novel tunable band-pass filter based on a single square-ring MEMS resonator
A novel tunable band-pass filter based on a single square-ring MEMS resonator
This paper reports a new MEMS resonator comprising of four identical beams connected at right angles in a square ring and utilizes the tuning of two neighbouring modes to construct a single resonator band-pass filter. A novel frequency tuning mechanism is introduced to accurately control the bandwidth and centre frequency. A representative measurement demonstrates continuous shift of the centre frequency and 3dB-bandwidth from 594.825 KHz to 595.180 KHz and from 1.02 KHz to 0.55 KHz, respectively, by varying DC bias voltages from ?20 V to +20 V and the average ripple is 2.37 dB.
1446-1449
Zou, Xudong
fd06193c-e337-4bea-b99d-2f304eaaeafc
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Zou, Xudong
fd06193c-e337-4bea-b99d-2f304eaaeafc
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, Ashwin A.
6fe2b5b5-e451-41e2-a23a-601c9faf7d8a
Zou, Xudong, Yan, Jize and Seshia, Ashwin A.
(2010)
A novel tunable band-pass filter based on a single square-ring MEMS resonator.
[in special issue: Eurosensor XXIV Conference]
Procedia Engineering, 5, .
(doi:10.1016/j.proeng.2010.09.388).
Abstract
This paper reports a new MEMS resonator comprising of four identical beams connected at right angles in a square ring and utilizes the tuning of two neighbouring modes to construct a single resonator band-pass filter. A novel frequency tuning mechanism is introduced to accurately control the bandwidth and centre frequency. A representative measurement demonstrates continuous shift of the centre frequency and 3dB-bandwidth from 594.825 KHz to 595.180 KHz and from 1.02 KHz to 0.55 KHz, respectively, by varying DC bias voltages from ?20 V to +20 V and the average ripple is 2.37 dB.
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e-pub ahead of print date: 23 October 2010
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 394191
URI: http://eprints.soton.ac.uk/id/eprint/394191
PURE UUID: 75c292df-d982-4f6d-b849-d95f2f03b8a4
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Date deposited: 01 Jun 2016 15:50
Last modified: 15 Mar 2024 03:53
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Author:
Xudong Zou
Author:
Ashwin A. Seshia
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