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Integrated optical waveguides and inertial focussing microfluidics in silica for microflow cytometry applications

Integrated optical waveguides and inertial focussing microfluidics in silica for microflow cytometry applications
Integrated optical waveguides and inertial focussing microfluidics in silica for microflow cytometry applications
A key challenge in the development of a microflow cytometry platform is the integration of the optical components with the fluidics as this requires compatible micro-optical and microfluidic technologies. In this work a microflow cytometry platform is presented comprising monolithically integrated waveguides and deep microfluidics in a rugged silica chip. Integrated waveguides are used to deliver excitation light to an etched microfluidic channel and also collect transmitted light. The fluidics are designed to employ inertial focussing, a particle positioning technique, to reduce signal variation by bringing the flowing particles onto the same plane as the excitation light beam. A fabrication process is described which exploits microelectronics mass production techniques including: sputtering, ICP etching and PECVD. Example devices were fabricated and the effectiveness of inertial focussing of 5.6 µm fluorescent beads was studied showing lateral and vertical confinement of flowing beads within the microfluidic channel. The fluorescence signals from flowing calibration beads were quantified demonstrating a CV of 26%. Finally the potential of this type of device for measuring the variation in optical transmission from input to output waveguide as beads flowed through the beam was evaluated.
0960-1317
1-11
Butement, Jonathan
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Hunt, Hamish
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Rowe, David
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Sessions, Neil
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Clark, Owain
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Hua, Ping
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Murugan, G. Senthil
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Chad, John
d220e55e-3c13-4d1d-ae9a-1cfae8ccfbe1
Wilkinson, James
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Butement, Jonathan
581ce321-f1af-4a2f-870a-9d8d45133586
Hunt, Hamish
b58afe40-9102-4a47-8d81-1fdd5463f4fe
Rowe, David
a0e0fe82-5e29-42b8-b370-5236a722f015
Sessions, Neil
ee737092-56b4-403e-a2f9-764e07e42625
Clark, Owain
d2b922ab-3d98-42fc-97d9-042644666f73
Hua, Ping
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Murugan, G. Senthil
a867686e-0535-46cc-ad85-c2342086b25b
Chad, John
d220e55e-3c13-4d1d-ae9a-1cfae8ccfbe1
Wilkinson, James
73483cf3-d9f2-4688-9b09-1c84257884ca

Butement, Jonathan, Hunt, Hamish, Rowe, David, Sessions, Neil, Clark, Owain, Hua, Ping, Murugan, G. Senthil, Chad, John and Wilkinson, James (2016) Integrated optical waveguides and inertial focussing microfluidics in silica for microflow cytometry applications. Journal of Micromechanics and Microengineering, 26 (10), 1-11, [105004]. (doi:10.1088/0960-1317/26/10/105004).

Record type: Article

Abstract

A key challenge in the development of a microflow cytometry platform is the integration of the optical components with the fluidics as this requires compatible micro-optical and microfluidic technologies. In this work a microflow cytometry platform is presented comprising monolithically integrated waveguides and deep microfluidics in a rugged silica chip. Integrated waveguides are used to deliver excitation light to an etched microfluidic channel and also collect transmitted light. The fluidics are designed to employ inertial focussing, a particle positioning technique, to reduce signal variation by bringing the flowing particles onto the same plane as the excitation light beam. A fabrication process is described which exploits microelectronics mass production techniques including: sputtering, ICP etching and PECVD. Example devices were fabricated and the effectiveness of inertial focussing of 5.6 µm fluorescent beads was studied showing lateral and vertical confinement of flowing beads within the microfluidic channel. The fluorescence signals from flowing calibration beads were quantified demonstrating a CV of 26%. Finally the potential of this type of device for measuring the variation in optical transmission from input to output waveguide as beads flowed through the beam was evaluated.

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jbutement_JMM_revised_22062016.pdf - Accepted Manuscript
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More information

Accepted/In Press date: 11 July 2016
e-pub ahead of print date: 23 August 2016
Published date: 23 August 2016
Organisations: Optoelectronics Research Centre, Electronics & Computer Science, Centre for Biological Sciences

Identifiers

Local EPrints ID: 398140
URI: http://eprints.soton.ac.uk/id/eprint/398140
ISSN: 0960-1317
PURE UUID: 4496603a-efbd-47e9-a0f7-bfab5114a51c
ORCID for David Rowe: ORCID iD orcid.org/0000-0002-1167-150X
ORCID for G. Senthil Murugan: ORCID iD orcid.org/0000-0002-2733-3273
ORCID for John Chad: ORCID iD orcid.org/0000-0001-6442-4281
ORCID for James Wilkinson: ORCID iD orcid.org/0000-0003-4712-1697

Catalogue record

Date deposited: 20 Jul 2016 10:20
Last modified: 17 Dec 2019 06:43

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Contributors

Author: Jonathan Butement
Author: Hamish Hunt
Author: David Rowe ORCID iD
Author: Neil Sessions
Author: Owain Clark
Author: Ping Hua
Author: John Chad ORCID iD
Author: James Wilkinson ORCID iD

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