Narrow bandwidth single-resonator MEMS tuning fork filter

Yan, Jize, Seshia, A. Ashwin, Phan, L. Kim and Steeneken, G. Peter (2007) Narrow bandwidth single-resonator MEMS tuning fork filter. 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, , Geneva, Switzerland. 29 May - 01 Jun 2007. pp. 1366-1369 . (doi:10.1109/FREQ.2007.4319300).

Record type: Conference or Workshop Item (Paper)

Abstract

We present a solution for a fourth-order, narrow-bandwidth filter comprising of a single silicon tuning fork resonator driven using one electrode only. Voltage controlled electrical spring tuning is employed to match the primary and secondary modes of the resonator to achieve filter response. A narrow bandwidth single resonator MEMS tuning fork filter is demonstrated with a center frequency of 1.2866 MHz, a 3 dB-bandwidth of 0.0085% and a 1.5 dB ripple.

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e-pub ahead of print date: 2007

Venue - Dates: 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, , Geneva, Switzerland, 2007-05-29 - 2007-06-01

Organisations: Nanoelectronics and Nanotechnology