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Effects of mechanical and electrical coupling on the parametric sensitivity of mode localized sensors

Effects of mechanical and electrical coupling on the parametric sensitivity of mode localized sensors
Effects of mechanical and electrical coupling on the parametric sensitivity of mode localized sensors
We compare and contrast the effects of two distinctly different mechanisms of coupling (mechanical and electrical) on the parametric sensitivity of micromechanical sensors utilizing mode localization for sensor applications. For the first time, the strong correlation between mode localization and the phenomenon of 'eigenvalue loci-veering' is exploited for accurate quantification of the strength of internal coupling in mode localized sensors. The effects of capacitive coupling-spring tuning on the parametric sensitivity of electrically coupled resonators utilizing this sensing paradigm is also investigated and a mass sensor with sensitivity tunable by over 400% is realized.
1183-1186
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Woodhouse, Jim
9d16e0d0-94f5-45cd-8359-77c22be83c09
Aziz, A.
859fe7f2-3a73-48fe-907d-fc60eb4c2815
Seshia, A Seshia
5bb5bdcc-c3d7-4dc8-a631-d7149bc7e08e
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Woodhouse, Jim
9d16e0d0-94f5-45cd-8359-77c22be83c09
Aziz, A.
859fe7f2-3a73-48fe-907d-fc60eb4c2815
Seshia, A Seshia
5bb5bdcc-c3d7-4dc8-a631-d7149bc7e08e

Thiruvenkatanathan, Pradyumna, Yan, Jize, Woodhouse, Jim, Aziz, A. and Seshia, A Seshia (2009) Effects of mechanical and electrical coupling on the parametric sensitivity of mode localized sensors. 2009 IEEE International Ultrasonics Symposium, Italy. 20 - 23 Sep 2009. pp. 1183-1186 . (doi:10.1109/ULTSYM.2009.5441687).

Record type: Conference or Workshop Item (Paper)

Abstract

We compare and contrast the effects of two distinctly different mechanisms of coupling (mechanical and electrical) on the parametric sensitivity of micromechanical sensors utilizing mode localization for sensor applications. For the first time, the strong correlation between mode localization and the phenomenon of 'eigenvalue loci-veering' is exploited for accurate quantification of the strength of internal coupling in mode localized sensors. The effects of capacitive coupling-spring tuning on the parametric sensitivity of electrically coupled resonators utilizing this sensing paradigm is also investigated and a mass sensor with sensitivity tunable by over 400% is realized.

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More information

e-pub ahead of print date: 2009
Venue - Dates: 2009 IEEE International Ultrasonics Symposium, Italy, 2009-09-20 - 2009-09-23
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398827
URI: https://eprints.soton.ac.uk/id/eprint/398827
PURE UUID: 4038ea89-4c6b-4f9c-88c4-058329e69553
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 03 Aug 2016 10:51
Last modified: 20 Jul 2019 00:34

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