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Parametrically excited mems vibration energy harvesters

Parametrically excited mems vibration energy harvesters
Parametrically excited mems vibration energy harvesters
Resonant-based vibration harvesters have conventionally relied upon accessing the fundamental mode of resonance to maximise the conversion efficiency of mechanical-to-electrical power transduction. This paper explores the use of parametric resonance, which is not limited by linear damping and can potentially offer higher and broader nonlinear peaks. Despite the promising potential, a damping-dependent initiation threshold amplitude has to be overcome first. Design approaches have been explored to resolve this limitation. A numerical model has been constructed to analysis the improvements over the convention. An out-of-plane (to accommodate large displacements) electrostatic MEMS prototype (~ 0.147 mm3), driven at 4.2 ms-2, has demonstrated a peak power of 0.011 ?W at the fundamental mode of resonance and 0.16 ?W at the principal parametric resonance. A two fold increase in frequency bandwidth was also observed for the parametrically excited device.
Yu, Jia
31359d1b-9301-4356-87f6-ff3d04fae771
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Yu, Jia
31359d1b-9301-4356-87f6-ff3d04fae771
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b
Seshia, A Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e

Yu, Jia, Yan, Jize, Soga, Kenichi and Seshia, A Ashwin (2012) Parametrically excited mems vibration energy harvesters. 12th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2012), United States. 02 - 05 Dec 2012. 4 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

Resonant-based vibration harvesters have conventionally relied upon accessing the fundamental mode of resonance to maximise the conversion efficiency of mechanical-to-electrical power transduction. This paper explores the use of parametric resonance, which is not limited by linear damping and can potentially offer higher and broader nonlinear peaks. Despite the promising potential, a damping-dependent initiation threshold amplitude has to be overcome first. Design approaches have been explored to resolve this limitation. A numerical model has been constructed to analysis the improvements over the convention. An out-of-plane (to accommodate large displacements) electrostatic MEMS prototype (~ 0.147 mm3), driven at 4.2 ms-2, has demonstrated a peak power of 0.011 ?W at the fundamental mode of resonance and 0.16 ?W at the principal parametric resonance. A two fold increase in frequency bandwidth was also observed for the parametrically excited device.

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More information

e-pub ahead of print date: 2012
Venue - Dates: 12th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2012), United States, 2012-12-02 - 2012-12-05
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398848
URI: https://eprints.soton.ac.uk/id/eprint/398848
PURE UUID: 83a60f6f-6353-4ca4-a1b4-fe85f1c3e887
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 04 Aug 2016 10:52
Last modified: 06 Jun 2018 12:20

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