A multi-degree-of-freedom electrostatic mems power harvester

Wong, Zi Jing, Yan, Jize, Soga, Kenichi and Seshia, Ashwin (2009) A multi-degree-of-freedom electrostatic mems power harvester. International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, United Kingdom. 01 - 04 Dec 2009. 4 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

This paper reports the design, modeling and experimental characterization of a multi-degree-of freedom electrostatic vibration energy harvester. The potential of harvesting vibrational energy at multiple input frequencies and achieving displacement amplification in the response is investigated. To better understand the device performance at a system level, a numerical model which incorporates mechanical and electrical analysis in a charge constrained conversion circuit is developed. Experimental results on a microfabricated prototype demonstrate a maximum measured output power of 0.076 ?W at 1.4 kHz for an external load of 5.1 M?. We also experimentally demonstrate that the output power varies with the square of input acceleration and DC bias voltage.

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e-pub ahead of print date: December 2009

Venue - Dates: International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Washington, United Kingdom, 2009-12-01 - 2009-12-04

Organisations: Nanoelectronics and Nanotechnology