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A multi-degree-of-freedom electrostatic mems power harvester

A multi-degree-of-freedom electrostatic mems power harvester
A multi-degree-of-freedom electrostatic mems power harvester
This paper reports the design, modeling and experimental characterization of a multi-degree-of freedom electrostatic vibration energy harvester. The potential of harvesting vibrational energy at multiple input frequencies and achieving displacement amplification in the response is investigated. To better understand the device performance at a system level, a numerical model which incorporates mechanical and electrical analysis in a charge constrained conversion circuit is developed. Experimental results on a microfabricated prototype demonstrate a maximum measured output power of 0.076 ?W at 1.4 kHz for an external load of 5.1 M?. We also experimentally demonstrate that the output power varies with the square of input acceleration and DC bias voltage.
Wong, Zi Jing
2c2703e2-789e-43f3-bbcd-b7a4bcb94ce5
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b
Seshia, Ashwin
4389f1ed-603a-4fed-9ceb-6279102b0fad
Wong, Zi Jing
2c2703e2-789e-43f3-bbcd-b7a4bcb94ce5
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Soga, Kenichi
e43028e3-af4d-4ea4-a747-6cc6dacc849b
Seshia, Ashwin
4389f1ed-603a-4fed-9ceb-6279102b0fad

Wong, Zi Jing, Yan, Jize, Soga, Kenichi and Seshia, Ashwin (2009) A multi-degree-of-freedom electrostatic mems power harvester. International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, United Kingdom. 01 - 04 Dec 2009. 4 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

This paper reports the design, modeling and experimental characterization of a multi-degree-of freedom electrostatic vibration energy harvester. The potential of harvesting vibrational energy at multiple input frequencies and achieving displacement amplification in the response is investigated. To better understand the device performance at a system level, a numerical model which incorporates mechanical and electrical analysis in a charge constrained conversion circuit is developed. Experimental results on a microfabricated prototype demonstrate a maximum measured output power of 0.076 ?W at 1.4 kHz for an external load of 5.1 M?. We also experimentally demonstrate that the output power varies with the square of input acceleration and DC bias voltage.

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More information

e-pub ahead of print date: December 2009
Venue - Dates: International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, United Kingdom, 2009-12-01 - 2009-12-04
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 398850
URI: https://eprints.soton.ac.uk/id/eprint/398850
PURE UUID: 1977a736-d420-4fe8-8e22-5b3feaa0b6bd
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847

Catalogue record

Date deposited: 03 Aug 2016 11:20
Last modified: 06 Jun 2018 12:20

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