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Data for Isotropic contractive scaling of laser written microstructures in vitrified aerogels

Data for Isotropic contractive scaling of laser written microstructures in vitrified aerogels
Data for Isotropic contractive scaling of laser written microstructures in vitrified aerogels
A novel route is presented enabling minimization of feature sizes via laser ablative micro-patterning in highly porous silica aerogel monoliths and subsequent viscous sintering. Vitrification yields isotropically contracted silica solids preserving their original stereometric forms. The contraction depends on aerogel structure and porosity and we demonstrate here the first realization of a 3:1 ratio. Surface relief and void micropatterns inscribed in the monolith also undergo isotropic contraction and feature minimization beyond the spatial resolution of their original recording. Experimental results provide clear evidence that embedded void structures undergo contraction larger than the nominal stereometric scaling. This is a demonstration of a generic principle that enables fundamental physical resolution limits to be surpassed, leading to new avenues in micro- and nano-fabrication technologies.
University of Southampton
Vainos, Nikolaos A.
3288f903-d80b-4b39-9042-26106eb3f064
Karoutsos, Vagelis
64e29fc1-d119-4454-a4de-0f0572cde8bf
Mills, Benjamin
05f1886e-96ef-420f-b856-4115f4ab36d0
Eason, Robert
e38684c3-d18c-41b9-a4aa-def67283b020
Prassas, Michel
5811d39e-a848-44c3-945d-4541e80b4666
Vainos, Nikolaos A.
3288f903-d80b-4b39-9042-26106eb3f064
Karoutsos, Vagelis
64e29fc1-d119-4454-a4de-0f0572cde8bf
Mills, Benjamin
05f1886e-96ef-420f-b856-4115f4ab36d0
Eason, Robert
e38684c3-d18c-41b9-a4aa-def67283b020
Prassas, Michel
5811d39e-a848-44c3-945d-4541e80b4666

Vainos, Nikolaos A., Karoutsos, Vagelis, Mills, Benjamin, Eason, Robert and Prassas, Michel (2016) Data for Isotropic contractive scaling of laser written microstructures in vitrified aerogels. University of Southampton doi:10.5258/SOTON/400836 [Dataset]

Record type: Dataset

Abstract

A novel route is presented enabling minimization of feature sizes via laser ablative micro-patterning in highly porous silica aerogel monoliths and subsequent viscous sintering. Vitrification yields isotropically contracted silica solids preserving their original stereometric forms. The contraction depends on aerogel structure and porosity and we demonstrate here the first realization of a 3:1 ratio. Surface relief and void micropatterns inscribed in the monolith also undergo isotropic contraction and feature minimization beyond the spatial resolution of their original recording. Experimental results provide clear evidence that embedded void structures undergo contraction larger than the nominal stereometric scaling. This is a demonstration of a generic principle that enables fundamental physical resolution limits to be surpassed, leading to new avenues in micro- and nano-fabrication technologies.

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AERO_ETCH_RATES.xlsx - Dataset
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lineThickness.m - Dataset
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More information

Published date: 2016
Organisations: Optoelectronics Research Centre, Faculty of Physical Sciences and Engineering

Identifiers

Local EPrints ID: 400836
URI: http://eprints.soton.ac.uk/id/eprint/400836
PURE UUID: 5fd8c93e-3eb4-4af1-9f3f-979aab7bf6d5
ORCID for Benjamin Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for Robert Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 04 Oct 2016 10:29
Last modified: 06 Jun 2018 13:13

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Contributors

Creator: Nikolaos A. Vainos
Creator: Vagelis Karoutsos
Creator: Benjamin Mills ORCID iD
Creator: Robert Eason ORCID iD
Creator: Michel Prassas

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