Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides.
1-5
Debnath, Kapil
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Khokhar, Ali
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Boden, Stuart
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Oo, Swe Zin
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Chong, Harold
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Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shin
14a5d20b-055e-4f48-9dda-267e88bd3fdc
November 2016
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shin
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Debnath, Kapil, Khokhar, Ali, Boden, Stuart, Oo, Swe Zin, Chong, Harold, Reed, Graham and Saito, Shin
(2016)
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching.
Frontiers in Materials, 3 (51), .
(doi:10.3389/fmats.2016.00051).
Abstract
We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides.
Text
SlotWg_KDebnath.pdf
- Accepted Manuscript
Text
fmats-03-00051
- Version of Record
More information
Accepted/In Press date: 4 November 2016
e-pub ahead of print date: 22 November 2016
Published date: November 2016
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 402552
URI: http://eprints.soton.ac.uk/id/eprint/402552
PURE UUID: 26608752-e953-4759-b110-87724ca0963e
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Date deposited: 11 Nov 2016 14:02
Last modified: 15 Mar 2024 03:43
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Contributors
Author:
Kapil Debnath
Author:
Ali Khokhar
Author:
Stuart Boden
Author:
Swe Zin Oo
Author:
Harold Chong
Author:
Graham Reed
Author:
Shin Saito
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