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Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching

Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching
We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides.
1-5
Debnath, Kapil
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Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shin
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shin
14a5d20b-055e-4f48-9dda-267e88bd3fdc

Debnath, Kapil, Khokhar, Ali, Boden, Stuart, Oo, Swe Zin, Chong, Harold, Reed, Graham and Saito, Shin (2016) Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching. Frontiers in Materials, 1-5. (doi:10.3389/fmats.2016.00051).

Record type: Article

Abstract

We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides.

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More information

Accepted/In Press date: 4 November 2016
e-pub ahead of print date: 4 November 2016
Published date: 22 November 2016
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 402552
URI: https://eprints.soton.ac.uk/id/eprint/402552
PURE UUID: 26608752-e953-4759-b110-87724ca0963e
ORCID for Stuart Boden: ORCID iD orcid.org/0000-0002-4232-1828
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Shin Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 11 Nov 2016 14:02
Last modified: 03 Dec 2019 01:48

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Contributors

Author: Kapil Debnath
Author: Ali Khokhar
Author: Stuart Boden ORCID iD
Author: Swe Zin Oo
Author: Harold Chong ORCID iD
Author: Graham Reed
Author: Shin Saito ORCID iD

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