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Optical quality ZnSe films and low loss waveguides on Si substrates for mid-infrared applications

Optical quality ZnSe films and low loss waveguides on Si substrates for mid-infrared applications
Optical quality ZnSe films and low loss waveguides on Si substrates for mid-infrared applications
Zinc Selenide (ZnSe) is a promising mid-infrared waveguide material with high refractive index and wide transparency. Optical quality ZnSe thin films were deposited on silicon substrates by RF sputtering and thermal evaporation, and characterized and compared for material and optical properties. Evaporated films were found to be denser and smoother than sputtered films. Rib waveguides were fabricated from these films and evaporated films exhibited losses as low as 0.6 dB/cm at wavelengths between 2.5 µm and 3.7 µm. The films were also used as isolation/lower cladding layers on Si with GeTe4 as the waveguide core and propagation losses were determined in this wavelength range.
712-725
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Sessions, Neil
ee737092-56b4-403e-a2f9-764e07e42625
Wilkinson, James
73483cf3-d9f2-4688-9b09-1c84257884ca
Murugan, Ganapathy Senthil
a867686e-0535-46cc-ad85-c2342086b25b
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Sessions, Neil
ee737092-56b4-403e-a2f9-764e07e42625
Wilkinson, James
73483cf3-d9f2-4688-9b09-1c84257884ca
Murugan, Ganapathy Senthil
a867686e-0535-46cc-ad85-c2342086b25b

Mittal, Vinita, Sessions, Neil, Wilkinson, James and Murugan, Ganapathy Senthil (2017) Optical quality ZnSe films and low loss waveguides on Si substrates for mid-infrared applications. Optical Materials Express, 7 (3), 712-725. (doi:10.1364/OME.7.000712).

Record type: Article

Abstract

Zinc Selenide (ZnSe) is a promising mid-infrared waveguide material with high refractive index and wide transparency. Optical quality ZnSe thin films were deposited on silicon substrates by RF sputtering and thermal evaporation, and characterized and compared for material and optical properties. Evaporated films were found to be denser and smoother than sputtered films. Rib waveguides were fabricated from these films and evaporated films exhibited losses as low as 0.6 dB/cm at wavelengths between 2.5 µm and 3.7 µm. The films were also used as isolation/lower cladding layers on Si with GeTe4 as the waveguide core and propagation losses were determined in this wavelength range.

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More information

Accepted/In Press date: 27 January 2017
e-pub ahead of print date: 2 February 2017
Published date: 2 February 2017
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 405452
URI: http://eprints.soton.ac.uk/id/eprint/405452
PURE UUID: 9c22d2c8-f203-4cad-8fe0-69bd95860523
ORCID for Vinita Mittal: ORCID iD orcid.org/0000-0003-4836-5327
ORCID for James Wilkinson: ORCID iD orcid.org/0000-0003-4712-1697
ORCID for Ganapathy Senthil Murugan: ORCID iD orcid.org/0000-0002-2733-3273

Catalogue record

Date deposited: 03 Feb 2017 16:33
Last modified: 17 Dec 2019 02:04

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