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Pulsed laser deposition of garnets at a growth rate of 20-microns per hour

Pulsed laser deposition of garnets at a growth rate of 20-microns per hour
Pulsed laser deposition of garnets at a growth rate of 20-microns per hour

To date, pulsed laser deposition (PLD) has been used for depositing many different materials under the classes of metals, semiconductors, and dielectrics. For the latter, PLD is advantageous for fabrication of crystalline layers that are suitable for high quality planar waveguides. In previous work, we showed PLD can be exploited for fabricating garnet-crystal layers, specifically Yb:YAG, with optical quality close to Czochralski grown material [1]. Typical growth rates are slow at < 1 microns per hour but some progress has been made increasing depositions using a pulsed laser operating at a repetition rate of 20 Hz [2].

Here, we report a ~ 5 x increase in growth rate from previous work, demonstrating that YGG and YAG can be grown with excellent crystal quality at deposition rates approaching 20-microns per hour by using an excimer laser operating at a repetition rate of 100 Hz. This surprising result demonstrates the unique capability of PLD at 100 Hz, for upscaling deposition speeds to a rate that is industrially relevant for thick films.

1. Stephen J. Beecher et al. Proc. SPIE 9726, Solid State Lasers XXV: Technology and Devices, 97261Z (March 16, 2016)

2. J.A. Grant-Jacob et al. Opt. Mater. Express 6, 91-96 (2016)

Q 1.9
Grant-Jacob, James
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Beecher, Stephen
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Shepherd, David
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Eason, Robert
e38684c3-d18c-41b9-a4aa-def67283b020
Mackenzie, Jacob
1d82c826-fdbf-425b-ac04-be43ccf12008
Grant-Jacob, James
c5d144d8-3c43-4195-8e80-edd96bfda91b
Beecher, Stephen
b3664adc-d6b5-4a5a-a09a-8e1415c6d3f5
Shepherd, David
9fdd51c4-39d6-41b3-9021-4c033c2f4ead
Eason, Robert
e38684c3-d18c-41b9-a4aa-def67283b020
Mackenzie, Jacob
1d82c826-fdbf-425b-ac04-be43ccf12008

Grant-Jacob, James, Beecher, Stephen, Shepherd, David, Eason, Robert and Mackenzie, Jacob (2017) Pulsed laser deposition of garnets at a growth rate of 20-microns per hour. E-MRS 2017 Spring Meeting, Strasbourg, France. 21 - 26 May 2017. Q 1.9 .

Record type: Conference or Workshop Item (Other)

Abstract

To date, pulsed laser deposition (PLD) has been used for depositing many different materials under the classes of metals, semiconductors, and dielectrics. For the latter, PLD is advantageous for fabrication of crystalline layers that are suitable for high quality planar waveguides. In previous work, we showed PLD can be exploited for fabricating garnet-crystal layers, specifically Yb:YAG, with optical quality close to Czochralski grown material [1]. Typical growth rates are slow at < 1 microns per hour but some progress has been made increasing depositions using a pulsed laser operating at a repetition rate of 20 Hz [2].

Here, we report a ~ 5 x increase in growth rate from previous work, demonstrating that YGG and YAG can be grown with excellent crystal quality at deposition rates approaching 20-microns per hour by using an excimer laser operating at a repetition rate of 100 Hz. This surprising result demonstrates the unique capability of PLD at 100 Hz, for upscaling deposition speeds to a rate that is industrially relevant for thick films.

1. Stephen J. Beecher et al. Proc. SPIE 9726, Solid State Lasers XXV: Technology and Devices, 97261Z (March 16, 2016)

2. J.A. Grant-Jacob et al. Opt. Mater. Express 6, 91-96 (2016)

Text
EMRS_2017_100Hz JGJ_Final - Author's Original
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More information

Accepted/In Press date: 28 February 2017
Published date: May 2017
Venue - Dates: E-MRS 2017 Spring Meeting, Strasbourg, France, 2017-05-21 - 2017-05-26
Organisations: Optoelectronics Research Centre, Faculty of Physical Sciences and Engineering

Identifiers

Local EPrints ID: 406851
URI: https://eprints.soton.ac.uk/id/eprint/406851
PURE UUID: fc18f281-4e06-4d6b-8d62-1a493927d97c
ORCID for James Grant-Jacob: ORCID iD orcid.org/0000-0002-4270-4247
ORCID for David Shepherd: ORCID iD orcid.org/0000-0002-4561-8184
ORCID for Robert Eason: ORCID iD orcid.org/0000-0001-9704-2204
ORCID for Jacob Mackenzie: ORCID iD orcid.org/0000-0002-3355-6051

Catalogue record

Date deposited: 24 Mar 2017 02:05
Last modified: 14 Mar 2019 01:55

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Contributors

Author: Stephen Beecher
Author: David Shepherd ORCID iD
Author: Robert Eason ORCID iD
Author: Jacob Mackenzie ORCID iD

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