Raw data for "Low-loss silicon slot waveguide realized by surface roughness reduction"
Raw data for "Low-loss silicon slot waveguide realized by surface roughness reduction"
This dataset contains the raw data used for the figures in the paper Debnath K, Khokhar A, Reed G, Saito S. Low-loss silicon slot waveguide realized by surface roughness reduction. In 2016 IEEE 13th International Conference on Group IV photonics (GFP). Piscataway, US: IEEE. 2016. Available from DOI: 10.1109/GROUP4.2016.7739069
Abstract: We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by a combination of dry and wet etching to realize propagation loss of 4dB/cm for a waveguide with a slot width of 120nm.
University of Southampton
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Debnath, Kapil, Khokhar, Ali, Reed, Graham and Saito, Shinichi
(2016)
Raw data for "Low-loss silicon slot waveguide realized by surface roughness reduction".
University of Southampton
doi:10.5258/SOTON/391467
[Dataset]
Abstract
This dataset contains the raw data used for the figures in the paper Debnath K, Khokhar A, Reed G, Saito S. Low-loss silicon slot waveguide realized by surface roughness reduction. In 2016 IEEE 13th International Conference on Group IV photonics (GFP). Piscataway, US: IEEE. 2016. Available from DOI: 10.1109/GROUP4.2016.7739069
Abstract: We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by a combination of dry and wet etching to realize propagation loss of 4dB/cm for a waveguide with a slot width of 120nm.
Spreadsheet
Figures_metadata.xlsx
- Dataset
More information
Published date: 2016
Organisations:
Nanoelectronics and Nanotechnology, Optoelectronics Research Centre, Photonic Systems Circuits & Sensors
Identifiers
Local EPrints ID: 411305
URI: http://eprints.soton.ac.uk/id/eprint/411305
PURE UUID: 66f48cc5-eae9-4603-9c61-68865e1cd2c4
Catalogue record
Date deposited: 16 Jun 2017 16:43
Last modified: 05 Nov 2023 02:46
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Contributors
Creator:
Kapil Debnath
Creator:
Ali Khokhar
Creator:
Shinichi Saito
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