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Raw data for "Low-loss silicon slot waveguide realized by surface roughness reduction"

Raw data for "Low-loss silicon slot waveguide realized by surface roughness reduction"
Raw data for "Low-loss silicon slot waveguide realized by surface roughness reduction"
This dataset contains the raw data used for the figures in the paper Debnath K, Khokhar A, Reed G, Saito S. Low-loss silicon slot waveguide realized by surface roughness reduction. In 2016 IEEE 13th International Conference on Group IV photonics (GFP). Piscataway, US: IEEE. 2016. Available from DOI: 10.1109/GROUP4.2016.7739069Abstract: We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by a combination of dry and wet etching to realize propagation loss of 4dB/cm for a waveguide with a slot width of 120nm.
University of Southampton
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc

Debnath, Kapil, Khokhar, Ali, Reed, Graham and Saito, Shinichi (2016) Raw data for "Low-loss silicon slot waveguide realized by surface roughness reduction". University of Southampton doi:10.5258/SOTON/391467 [Dataset]

Record type: Dataset

Abstract

This dataset contains the raw data used for the figures in the paper Debnath K, Khokhar A, Reed G, Saito S. Low-loss silicon slot waveguide realized by surface roughness reduction. In 2016 IEEE 13th International Conference on Group IV photonics (GFP). Piscataway, US: IEEE. 2016. Available from DOI: 10.1109/GROUP4.2016.7739069Abstract: We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented to the <;11-2> direction on the Si (110) plane are fabricated by a combination of dry and wet etching to realize propagation loss of 4dB/cm for a waveguide with a slot width of 120nm.

Spreadsheet
Figures_metadata.xlsx - Dataset
Available under License Creative Commons Attribution.
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Text
readme.txt - Text
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More information

Published date: 2016
Organisations: Nanoelectronics and Nanotechnology, Optoelectronics Research Centre, Photonic Systems Circuits & Sensors

Identifiers

Local EPrints ID: 411305
URI: https://eprints.soton.ac.uk/id/eprint/411305
PURE UUID: 66f48cc5-eae9-4603-9c61-68865e1cd2c4
ORCID for Shinichi Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 16 Jun 2017 16:43
Last modified: 06 Jun 2018 12:28

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Contributors

Creator: Kapil Debnath
Creator: Ali Khokhar
Creator: Graham Reed
Creator: Shinichi Saito ORCID iD

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