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Fabrication of silicon slot waveguides with 10nm wide oxide slot

Fabrication of silicon slot waveguides with 10nm wide oxide slot
Fabrication of silicon slot waveguides with 10nm wide oxide slot
We propose and demonstrate a fabrication technique to realize extremely narrow dielectric slots in silicon waveguides. Using this method, we have demonstrated a silicon slot waveguide with 10 nm dielectric slot with a measured propagation loss of 13.6 dB/cm.
1949-209X
IEEE
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc

Debnath, Kapil, Khokhar, Ali, Reed, Graham and Saito, Shinichi (2017) Fabrication of silicon slot waveguides with 10nm wide oxide slot. In 2017 IEEE 14th International Conference on Group IV Photonics (GFP). IEEE.. (doi:10.1109/GROUP4.2017.8082184).

Record type: Conference or Workshop Item (Paper)

Abstract

We propose and demonstrate a fabrication technique to realize extremely narrow dielectric slots in silicon waveguides. Using this method, we have demonstrated a silicon slot waveguide with 10 nm dielectric slot with a measured propagation loss of 13.6 dB/cm.

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More information

Accepted/In Press date: 5 June 2017
e-pub ahead of print date: 26 October 2017
Published date: 26 October 2017
Venue - Dates: 2017 IEEE 14th International Conference on Group IV Photonics (GFP), Berlin, Germany, 2017-08-23 - 2017-08-25
Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology, Photonic Systems Circuits & Sensors

Identifiers

Local EPrints ID: 411333
URI: https://eprints.soton.ac.uk/id/eprint/411333
ISSN: 1949-209X
PURE UUID: 5e2dc2ac-83bc-4a76-8d52-50914946d7e2
ORCID for Shinichi Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 19 Jun 2017 16:30
Last modified: 10 Dec 2019 01:36

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Contributors

Author: Kapil Debnath
Author: Ali Khokhar
Author: Graham Reed
Author: Shinichi Saito ORCID iD

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