Fabrication of silicon slot waveguides with 10nm wide oxide slot

Debnath, Kapil, Khokhar, Ali, Reed, Graham and Saito, Shinichi (2017) Fabrication of silicon slot waveguides with 10nm wide oxide slot. In 2017 IEEE 14th International Conference on Group IV Photonics (GFP). IEEE.. (doi:10.1109/GROUP4.2017.8082184).

Record type: Conference or Workshop Item (Paper)

Abstract

We propose and demonstrate a fabrication technique to realize extremely narrow dielectric slots in silicon waveguides. Using this method, we have demonstrated a silicon slot waveguide with 10 nm dielectric slot with a measured propagation loss of 13.6 dB/cm.

Text

GFP2017_KDebnath

Available under License Creative Commons Attribution.

Download (204kB)

More information

Accepted/In Press date: 5 June 2017

e-pub ahead of print date: 26 October 2017

Published date: 26 October 2017

Venue - Dates: 2017 IEEE 14th International Conference on Group IV Photonics (GFP), , Berlin, Germany, 2017-08-23 - 2017-08-25

Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology, Photonic Systems Circuits & Sensors

Learn more about Optoelectronics Research Centre research

Identifiers

Local EPrints ID: 411333

URI: http://eprints.soton.ac.uk/id/eprint/411333

DOI: doi:10.1109/GROUP4.2017.8082184

ISSN: 1949-209X

PURE UUID: 5e2dc2ac-83bc-4a76-8d52-50914946d7e2

ORCID for Graham Reed:

orcid.org/0009-0002-5314-6604

ORCID for Shinichi Saito:

orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 19 Jun 2017 16:30

Last modified: 20 May 2025 01:48

Export record

Altmetrics

Share this record

Share this on Facebook Share this on Twitter Share this on Weibo

Contributors

Author: Kapil Debnath

Author: Ali Khokhar

Author: Graham Reed

Author: Shinichi Saito

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Library staff additional information