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Fabrication of arbitrarily narrow vertical dielectric slots in silicon waveguides

Fabrication of arbitrarily narrow vertical dielectric slots in silicon waveguides
Fabrication of arbitrarily narrow vertical dielectric slots in silicon waveguides
Slot waveguides are used for many photonic applications. However, existing fabrication techniques impose restrictions on the width of the slot region. Here we propose and experimentally demonstrate a fabrication process to realize an arbitrarily narrow vertical dielectric slot in a silicon waveguide. Using this fabrication method we have realized silicon slot waveguides with a 10 nm oxide slot region. The propagation loss of the fabricated slot waveguide was 1.36±0.3 dB/mm.
1041-1135
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc

Debnath, Kapil, Khokhar, Ali Z., Reed, Graham T. and Saito, Shinichi (2017) Fabrication of arbitrarily narrow vertical dielectric slots in silicon waveguides. IEEE Photonics Technology Letters, 29. (doi:10.1109/LPT.2017.2722003).

Record type: Article

Abstract

Slot waveguides are used for many photonic applications. However, existing fabrication techniques impose restrictions on the width of the slot region. Here we propose and experimentally demonstrate a fabrication process to realize an arbitrarily narrow vertical dielectric slot in a silicon waveguide. Using this fabrication method we have realized silicon slot waveguides with a 10 nm oxide slot region. The propagation loss of the fabricated slot waveguide was 1.36±0.3 dB/mm.

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Accepted/In Press date: 27 June 2017
e-pub ahead of print date: 30 June 2017
Published date: 13 July 2017
Organisations: Optoelectronics Research Centre, Photonic Systems Circuits & Sensors, Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 411994
URI: https://eprints.soton.ac.uk/id/eprint/411994
ISSN: 1041-1135
PURE UUID: 09251d40-876c-47d7-a750-3cfbc5eaa1d5
ORCID for Shinichi Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 04 Jul 2017 16:31
Last modified: 10 Dec 2019 01:36

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Contributors

Author: Kapil Debnath
Author: Ali Z. Khokhar
Author: Graham T. Reed
Author: Shinichi Saito ORCID iD

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