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Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides

Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides
Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides
We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control.
photonic integrated circuits, silicon photonics
578-582
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milošević, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139

Chen, Xia, Milošević, Milan, Thomson, David, Khokhar, Ali, Franz, Yohann, Runge, Antoine, Mailis, Sakellaris, Peacock, Anna and Reed, Graham (2017) Post-fabrication phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides. Photonics Research, 5 (6), 578-582. (doi:10.1364/PRJ.5.000578).

Record type: Article

Abstract

We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control.

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More information

Submitted date: 26 June 2017
Accepted/In Press date: 11 September 2017
e-pub ahead of print date: 13 September 2017
Published date: 17 October 2017
Keywords: photonic integrated circuits, silicon photonics

Identifiers

Local EPrints ID: 412216
URI: https://eprints.soton.ac.uk/id/eprint/412216
PURE UUID: be6cf328-c6b4-45ec-9819-86096e874771
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 14 Jul 2017 16:30
Last modified: 15 Jul 2019 18:05

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