The University of Southampton
University of Southampton Institutional Repository
Warning ePrints Soton is experiencing an issue with some file downloads not being available. We are working hard to fix this. Please bear with us.

Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling

Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling
Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling
The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from 436 MPa compressive, to 13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.
1361-6439
1
Fishlock, S.J.
b35c425e-91f5-40a1-b3a7-d2939463fb19
O'Shea, S.J.
74a6cb65-ab4d-4e11-9f6f-68e5befe4f53
McBride, J.W.
d9429c29-9361-4747-9ba3-376297cb8770
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Fishlock, S.J.
b35c425e-91f5-40a1-b3a7-d2939463fb19
O'Shea, S.J.
74a6cb65-ab4d-4e11-9f6f-68e5befe4f53
McBride, J.W.
d9429c29-9361-4747-9ba3-376297cb8770
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43

Fishlock, S.J., O'Shea, S.J., McBride, J.W., Chong, H.M.H. and Pu, Suan-Hui (2017) Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling. Journal of Micromechanics and Microengineering, 27, 1, [095015]. (doi:10.1088/1361-6439/aa7ebb).

Record type: Article

Abstract

The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from 436 MPa compressive, to 13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.

Text
Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling - Author's Original
Restricted to Repository staff only
Request a copy
Text
Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling - Accepted Manuscript
Download (4MB)

More information

Accepted/In Press date: 10 July 2017
e-pub ahead of print date: 22 August 2017
Published date: 22 August 2017

Identifiers

Local EPrints ID: 414888
URI: http://eprints.soton.ac.uk/id/eprint/414888
ISSN: 1361-6439
PURE UUID: 6de20003-3b8f-430b-a97c-7d98a15f9136
ORCID for H.M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880

Catalogue record

Date deposited: 13 Oct 2017 16:30
Last modified: 22 Nov 2021 05:49

Export record

Altmetrics

Contributors

Author: S.J. Fishlock
Author: S.J. O'Shea
Author: J.W. McBride
Author: H.M.H. Chong ORCID iD
Author: Suan-Hui Pu ORCID iD

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×