Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling
Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling
The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from 436 MPa compressive, to 13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.
1
Fishlock, S.J.
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O'Shea, S.J.
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McBride, J.W.
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Chong, H.M.H.
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Pu, Suan-Hui
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22 August 2017
Fishlock, S.J.
b35c425e-91f5-40a1-b3a7-d2939463fb19
O'Shea, S.J.
74a6cb65-ab4d-4e11-9f6f-68e5befe4f53
McBride, J.W.
d9429c29-9361-4747-9ba3-376297cb8770
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Fishlock, S.J., O'Shea, S.J., McBride, J.W., Chong, H.M.H. and Pu, Suan-Hui
(2017)
Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling.
Journal of Micromechanics and Microengineering, 27, , [095015].
(doi:10.1088/1361-6439/aa7ebb).
Abstract
The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from 436 MPa compressive, to 13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.
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Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling
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Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling
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Accepted/In Press date: 10 July 2017
e-pub ahead of print date: 22 August 2017
Published date: 22 August 2017
Identifiers
Local EPrints ID: 414888
URI: http://eprints.soton.ac.uk/id/eprint/414888
ISSN: 1361-6439
PURE UUID: 6de20003-3b8f-430b-a97c-7d98a15f9136
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Date deposited: 13 Oct 2017 16:30
Last modified: 16 Mar 2024 05:47
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Author:
S.J. Fishlock
Author:
S.J. O'Shea
Author:
H.M.H. Chong
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