Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step

Abstract

Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step Fig. 2 Lapped and polished rib PPLN waveguide The black dashed line shows the area where surface roughness was measured using a Zemetrics Zescope white light interferometer. Polynomial levelling was applied to each 11 × 6 μm2 area before roughness values were calculated. Fig. 3 Ductile dicing of ridge PPLN waveguide with resin bonded blade The black dashed line shows the area where surface roughness was measured using a Zemetrics Zescope white light interferometer. Polynomial levelling was applied to each 11 × 6 μm2 area before roughness values were calculated. Fig. 4 Ductile dicing of rib PPLN waveguide with nickel bonded blade The black dashed line shows the area where surface roughness was measured using a Zemetrics Zescope white light interferometer. Polynomial levelling was applied to each 11 × 6 μm2 area before roughness values were calculated.

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