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Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step

Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step
Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step
Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process stepFig. 2 Lapped and polished rib PPLN waveguide The black dashed line shows the area where surface roughness was measured using a Zemetrics Zescope white light interferometer. Polynomial levelling was applied to each 11 × 6 μm2 area before roughness values were calculated.Fig. 3 Ductile dicing of ridge PPLN waveguide with resin bonded blade The black dashed line shows the area where surface roughness was measured using a Zemetrics Zescope white light interferometer. Polynomial levelling was applied to each 11 × 6 μm2 area before roughness values were calculated.Fig. 4 Ductile dicing of rib PPLN waveguide with nickel bonded blade The black dashed line shows the area where surface roughness was measured using a Zemetrics Zescope white light interferometer. Polynomial levelling was applied to each 11 × 6 μm2 area before roughness values were calculated.
University of Southampton
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759

Carpenter, Lewis (2017) Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step. University of Southampton doi:10.5258/SOTON/D0323 [Dataset]

Record type: Dataset

Abstract

Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process stepFig. 2 Lapped and polished rib PPLN waveguide The black dashed line shows the area where surface roughness was measured using a Zemetrics Zescope white light interferometer. Polynomial levelling was applied to each 11 × 6 μm2 area before roughness values were calculated.Fig. 3 Ductile dicing of ridge PPLN waveguide with resin bonded blade The black dashed line shows the area where surface roughness was measured using a Zemetrics Zescope white light interferometer. Polynomial levelling was applied to each 11 × 6 μm2 area before roughness values were calculated.Fig. 4 Ductile dicing of rib PPLN waveguide with nickel bonded blade The black dashed line shows the area where surface roughness was measured using a Zemetrics Zescope white light interferometer. Polynomial levelling was applied to each 11 × 6 μm2 area before roughness values were calculated.

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More information

Published date: 29 November 2017
Organisations: ORC Research

Identifiers

Local EPrints ID: 416243
URI: https://eprints.soton.ac.uk/id/eprint/416243
PURE UUID: c2e7a5db-679d-4da1-8501-054b027d1449

Catalogue record

Date deposited: 08 Dec 2017 17:31
Last modified: 16 Oct 2018 16:31

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Contributors

Creator: Lewis Carpenter

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