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Dataset for: Ion implantation in silicon for trimming the operating wavelength of ring resonators

Dataset for: Ion implantation in silicon for trimming the operating wavelength of ring resonators
Dataset for: Ion implantation in silicon for trimming the operating wavelength of ring resonators
Dataset for: Ion implantation in silicon for trimming the operating wavelength of ring resonators (DOI: 10.1109/JSTQE.2018.2799660)In recent years, we have presented results on the development of erasable gratings in silicon to facilitate wafer scale testing of photonics circuits via ion implantation of germanium. Similar technology can be employed to control the operating wavelength of ring resonators, which is very sensitive to fabrication imperfections. Ion implantation into silicon causes radiation damage resulting in a refractive index increase, and can therefore form the basis of multiple optical devices. In this paper we discuss design, modelling and fabrication of ring resonators and their subsequent trimming using ion implantation of germanium into silicon, followed by either rapid thermal annealing or localized laser annealing. The results confirm the ability permanently tune the position of the resonant wavelength to any point inside the free spectral range of the ring resonator, thus greatly reducing the amount of power required for active tuning of these devices.
University of Southampton
Milosevic, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Chen, Xia
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蔚, 曹
6194b5dd-d4e9-40d0-b5fb-b264d72fe594
Runge, Antoine FJ
874cec37-209b-4c7a-97a5-56d05596dd2b
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Littlejohns, Callum G.
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Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
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Thomson, David
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Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Milosevic, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
蔚, 曹
6194b5dd-d4e9-40d0-b5fb-b264d72fe594
Runge, Antoine FJ
874cec37-209b-4c7a-97a5-56d05596dd2b
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Littlejohns, Callum G.
5afcd207-0e00-4616-b269-e00f032a97d0
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139

Milosevic, Milan, Chen, Xia, 蔚, 曹, Runge, Antoine FJ, Franz, Yohann, Littlejohns, Callum G., Mailis, Sakellaris, Peacock, Anna, Thomson, David and Reed, Graham (2018) Dataset for: Ion implantation in silicon for trimming the operating wavelength of ring resonators. University of Southampton doi:10.5258/SOTON/D0417 [Dataset]

Record type: Dataset

Abstract

Dataset for: Ion implantation in silicon for trimming the operating wavelength of ring resonators (DOI: 10.1109/JSTQE.2018.2799660)In recent years, we have presented results on the development of erasable gratings in silicon to facilitate wafer scale testing of photonics circuits via ion implantation of germanium. Similar technology can be employed to control the operating wavelength of ring resonators, which is very sensitive to fabrication imperfections. Ion implantation into silicon causes radiation damage resulting in a refractive index increase, and can therefore form the basis of multiple optical devices. In this paper we discuss design, modelling and fabrication of ring resonators and their subsequent trimming using ion implantation of germanium into silicon, followed by either rapid thermal annealing or localized laser annealing. The results confirm the ability permanently tune the position of the resonant wavelength to any point inside the free spectral range of the ring resonator, thus greatly reducing the amount of power required for active tuning of these devices.

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More information

Published date: 24 January 2018
Organisations: ORC Research, Optoelectronics Research Centre, Photonic Systems Circuits & Sensors

Identifiers

Local EPrints ID: 418029
URI: https://eprints.soton.ac.uk/id/eprint/418029
PURE UUID: 503c3e4f-dd66-446e-971f-d61af65624b7
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for 曹 蔚: ORCID iD orcid.org/0000-0003-1431-7060
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 20 Feb 2018 17:37
Last modified: 06 Jun 2018 12:56

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Contributors

Creator: Milan Milosevic
Creator: Xia Chen ORCID iD
Creator: 曹 蔚 ORCID iD
Creator: Antoine FJ Runge
Creator: Yohann Franz
Creator: Callum G. Littlejohns
Creator: Anna Peacock ORCID iD
Creator: David Thomson
Creator: Graham Reed

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