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Electrothermal deterioration factors in gold planar inductors designed for microscale bio-applications

Electrothermal deterioration factors in gold planar inductors designed for microscale bio-applications
Electrothermal deterioration factors in gold planar inductors designed for microscale bio-applications
In this study, we present the fabrication of wafer level micro-inductors, designed for non invasive neuro-stimulation in vitro, along with an electrothermal study testing the influence of thermal phenomena to their performance. The electric performance of all micro-scale electromagnetic components is hampered by two dominant factors: Joule heating and electromigration. The scope of the study is to evaluate how these phenomena change the electric behaviour of the samples during activation. We experimentally define the safe area of operation across six types of samples with different geometric characteristics and we extract useful information for the reliability of the samples by comparing their median failure times. Our findings present the activation restrictions which should be taken into account in order to avoid the thermal degradation of the components, while at the same time could be used as design guidelines for similar geometries.
thermal degradation, planar micro-inductors, Joule heating, electromigration, microfabrication, micro-magnetic stimulation
0167-9317
61-66
Rizou, Maria-Eleni
3043e5bb-670b-4a38-878b-f0301a65afea
Prodromakis, Themis
d58c9c10-9d25-4d22-b155-06c8437acfbf
Rizou, Maria-Eleni
3043e5bb-670b-4a38-878b-f0301a65afea
Prodromakis, Themis
d58c9c10-9d25-4d22-b155-06c8437acfbf

Rizou, Maria-Eleni and Prodromakis, Themis (2018) Electrothermal deterioration factors in gold planar inductors designed for microscale bio-applications. Microelectronic Engineering, 197, 61-66. (doi:10.1016/j.mee.2018.05.006).

Record type: Article

Abstract

In this study, we present the fabrication of wafer level micro-inductors, designed for non invasive neuro-stimulation in vitro, along with an electrothermal study testing the influence of thermal phenomena to their performance. The electric performance of all micro-scale electromagnetic components is hampered by two dominant factors: Joule heating and electromigration. The scope of the study is to evaluate how these phenomena change the electric behaviour of the samples during activation. We experimentally define the safe area of operation across six types of samples with different geometric characteristics and we extract useful information for the reliability of the samples by comparing their median failure times. Our findings present the activation restrictions which should be taken into account in order to avoid the thermal degradation of the components, while at the same time could be used as design guidelines for similar geometries.

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Accepted/In Press date: 25 May 2018
e-pub ahead of print date: 29 May 2018
Published date: 5 October 2018
Keywords: thermal degradation, planar micro-inductors, Joule heating, electromigration, microfabrication, micro-magnetic stimulation

Identifiers

Local EPrints ID: 422029
URI: https://eprints.soton.ac.uk/id/eprint/422029
ISSN: 0167-9317
PURE UUID: b0bd21e3-9a30-41df-a694-85f30b5e985f
ORCID for Themis Prodromakis: ORCID iD orcid.org/0000-0002-6267-6909

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Date deposited: 12 Jul 2018 16:31
Last modified: 20 Jul 2019 04:15

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Contributors

Author: Maria-Eleni Rizou

University divisions

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