Fan, Junqing, Kapur, Omesh, Huang, Ruomeng, King, Sean W., De Groot, Cornelis and Jiang, Liudi (2018) Back-end-of-line a-SiOxCy:H dielectrics for resistive memory. AIP Advances, 8 (9). (doi:10.1063/1.5046564).
Abstract
Resistive switching of W/amorphous (a)-SiOxCy:H/Cu resistive memories incorporating solely native back-end-of-line (BEOL) materials were studied. A-SiC1.1:H, a-SiO0.9C0.7:H, and a-SiO1.5C0.2:H were exploited as switching layers for resistive memories which all show resistive-switching characteristics with ultrahigh ON/OFF ratios in the range of 1E6 to 1E10. Ohmic conduction in the low resistance state is attributed to the formation of Cu conductive filament inside the a-SiOxCy:H switching layer. Rupture of the conductive filament leads to current conduction dominated by Schottky emission through a-SiOxCy:H Schottky contacts. Comparison of the switching characteristics suggests composition of the a-SiOxCy:H has influences on VFORM and VSET, and current conduction mechanisms. These results demonstrate the capability to achieve functional W/a-SiOxCy:H/Cu using entirely BEOL native materials for future embedded resistive memories.
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- Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science
School of Electronics and Computer Science - Current Faculties > Faculty of Engineering and Physical Sciences > School of Engineering > Mechanical Engineering
Mechanical Engineering - Faculties (pre 2018 reorg) > Faculty of Natural and Environmental Sciences (pre 2018 reorg) > Institute for Life Sciences (pre 2018 reorg)
Current Faculties > Faculty of Environmental and Life Sciences > Institute for Life Sciences > Institute for Life Sciences (pre 2018 reorg)
Institute for Life Sciences > Institute for Life Sciences (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) - Faculties (pre 2011 reorg) > Faculty of Engineering Science & Maths (pre 2011 reorg) > Electronics & Computer Science (pre 2011 reorg) > IAM (pre 2011 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2011 reorg) > IAM (pre 2011 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2011 reorg) > IAM (pre 2011 reorg)
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