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Dataset for Back-end-of-line a-SiOxCy:H dielectrics for resistive memory

Dataset for Back-end-of-line a-SiOxCy:H dielectrics for resistive memory
Dataset for Back-end-of-line a-SiOxCy:H dielectrics for resistive memory
Dataset of figures in the paper Fan, J., Kapur, O., Huang, R., De Groot, C., & Jiang, L. (2018). Back-end-of-line a-SiOxCy:H dielectrics for resistive memory. AIP Advances. This dataset including XPS on a-SiOxCy:H films and current-voltage measurements tests on W/a-SiOxCy:H/Cu resistive memories.
University of Southampton
Fan, Junqing
0ca2fd5e-6520-47f8-9bfc-289c313a04cb
Kapur, Omesh
008af9d2-92eb-4749-a3be-210010f63449
Huang, Ruomeng
c6187811-ef2f-4437-8333-595c0d6ac978
King, Sean W.
fcb63aea-126f-4663-b64b-10553905e089
De Groot, Cornelis
92cd2e02-fcc4-43da-8816-c86f966be90c
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Fan, Junqing
0ca2fd5e-6520-47f8-9bfc-289c313a04cb
Kapur, Omesh
008af9d2-92eb-4749-a3be-210010f63449
Huang, Ruomeng
c6187811-ef2f-4437-8333-595c0d6ac978
King, Sean W.
fcb63aea-126f-4663-b64b-10553905e089
De Groot, Cornelis
92cd2e02-fcc4-43da-8816-c86f966be90c
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1

Fan, Junqing, Kapur, Omesh, Huang, Ruomeng, King, Sean W., De Groot, Cornelis and Jiang, Liudi (2018) Dataset for Back-end-of-line a-SiOxCy:H dielectrics for resistive memory. University of Southampton doi:10.5258/SOTON/D0641 [Dataset]

Record type: Dataset

Abstract

Dataset of figures in the paper Fan, J., Kapur, O., Huang, R., De Groot, C., & Jiang, L. (2018). Back-end-of-line a-SiOxCy:H dielectrics for resistive memory. AIP Advances. This dataset including XPS on a-SiOxCy:H films and current-voltage measurements tests on W/a-SiOxCy:H/Cu resistive memories.

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More information

Published date: 2018
Organisations: School of Engineering, School of Electronics and Computer Science, Mechanical Engineering

Identifiers

Local EPrints ID: 423262
URI: https://eprints.soton.ac.uk/id/eprint/423262
PURE UUID: 6a82a58b-425b-4cde-b4b3-8c894ae94910
ORCID for Cornelis De Groot: ORCID iD orcid.org/0000-0002-3850-7101
ORCID for Liudi Jiang: ORCID iD orcid.org/0000-0002-3400-825X

Catalogue record

Date deposited: 19 Sep 2018 16:31
Last modified: 06 Oct 2018 00:36

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Contributors

Creator: Junqing Fan
Creator: Omesh Kapur
Creator: Ruomeng Huang
Creator: Sean W. King
Creator: Liudi Jiang ORCID iD

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