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Silicon slot fin waveguide on bonded double-SOI for a low-power accumulation modulator fabricated by an anisotropic wet etching technique

Silicon slot fin waveguide on bonded double-SOI for a low-power accumulation modulator fabricated by an anisotropic wet etching technique
Silicon slot fin waveguide on bonded double-SOI for a low-power accumulation modulator fabricated by an anisotropic wet etching technique
We propose a new low VπL, fully-crystalline, accumulation modulator design based on a thin horizontal gate oxide slot fin waveguide, on bonded double Silicon-on-Insulator (SOI). A combination of anisotropic wet etching and the mirrored crystal alignment of the top and bottom SOI layers allows us for the first time to selectively pattern the bottom layer from above. Simulations presented herein show a VπL=0.17Vcm. Fin waveguides and passive Mach-Zehnder Interferometer (MZI) devices with fin-waveguide phase shifters have been fabricated, with the fin-waveguides having a transmission loss of 5.8dB/mm and a 13.5nm thick internal gate oxide slot.
1094-4087
33180-33191
Byers, James
124172c9-0709-4cb9-992e-acedc2eb02bf
Debnath, Kapil
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Arimoto, Hideo
b88aab51-ad62-4127-9ca5-d86e3d714531
Husain, Muhammad
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Sotto, Moise, Sala Henri
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Li, Zuo
05f14f5e-fc6e-446e-ac52-64be640b5e42
Liu, Fayong
beec7ff8-5835-4793-981b-fafd99b52549
Ibukuro, Kouta
b863054f-39db-4e0e-a2cb-981a86820dda
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Thomson, David
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Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc
Byers, James
124172c9-0709-4cb9-992e-acedc2eb02bf
Debnath, Kapil
aa01749d-524b-4464-b90a-af072e92a02f
Arimoto, Hideo
b88aab51-ad62-4127-9ca5-d86e3d714531
Husain, Muhammad
92db1f76-6760-4cf2-8e30-5d4a602fe15b
Sotto, Moise, Sala Henri
2e7797fc-4433-4513-bd08-03ab7839452c
Li, Zuo
05f14f5e-fc6e-446e-ac52-64be640b5e42
Liu, Fayong
beec7ff8-5835-4793-981b-fafd99b52549
Ibukuro, Kouta
b863054f-39db-4e0e-a2cb-981a86820dda
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Saito, Shinichi
14a5d20b-055e-4f48-9dda-267e88bd3fdc

Byers, James, Debnath, Kapil, Arimoto, Hideo, Husain, Muhammad, Sotto, Moise, Sala Henri, Li, Zuo, Liu, Fayong, Ibukuro, Kouta, Khokhar, Ali, Kiang, Kian Shen, Boden, Stuart, Thomson, David, Reed, Graham and Saito, Shinichi (2018) Silicon slot fin waveguide on bonded double-SOI for a low-power accumulation modulator fabricated by an anisotropic wet etching technique. Optics Express, 26 (25), 33180-33191. (doi:10.1364/OE.26.033180).

Record type: Article

Abstract

We propose a new low VπL, fully-crystalline, accumulation modulator design based on a thin horizontal gate oxide slot fin waveguide, on bonded double Silicon-on-Insulator (SOI). A combination of anisotropic wet etching and the mirrored crystal alignment of the top and bottom SOI layers allows us for the first time to selectively pattern the bottom layer from above. Simulations presented herein show a VπL=0.17Vcm. Fin waveguides and passive Mach-Zehnder Interferometer (MZI) devices with fin-waveguide phase shifters have been fabricated, with the fin-waveguides having a transmission loss of 5.8dB/mm and a 13.5nm thick internal gate oxide slot.

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Accepted/In Press date: 13 November 2018
e-pub ahead of print date: 5 December 2018

Identifiers

Local EPrints ID: 427044
URI: https://eprints.soton.ac.uk/id/eprint/427044
ISSN: 1094-4087
PURE UUID: c0410942-38be-4ebc-9b8f-a7c49361eadd
ORCID for Fayong Liu: ORCID iD orcid.org/0000-0003-4443-9720
ORCID for Kouta Ibukuro: ORCID iD orcid.org/0000-0002-6546-8873
ORCID for Kian Shen Kiang: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for Stuart Boden: ORCID iD orcid.org/0000-0002-4232-1828
ORCID for Shinichi Saito: ORCID iD orcid.org/0000-0003-1539-1182

Catalogue record

Date deposited: 20 Dec 2018 17:30
Last modified: 14 Mar 2019 01:43

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Contributors

Author: James Byers
Author: Kapil Debnath
Author: Hideo Arimoto
Author: Muhammad Husain
Author: Moise, Sala Henri Sotto
Author: Zuo Li
Author: Fayong Liu ORCID iD
Author: Kouta Ibukuro ORCID iD
Author: Ali Khokhar
Author: Kian Shen Kiang ORCID iD
Author: Stuart Boden ORCID iD
Author: David Thomson
Author: Graham Reed
Author: Shinichi Saito ORCID iD

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