A systematic approach to process selection in MEMS
A systematic approach to process selection in MEMS
A systematic approach is developed to select manufacturing Process Chains for the generic elements of a MEMS device. A database of MEMS Process Chains and their attendant process attributes is developed from an extensive review of the literature, and used to construct Process Attribute charts. The performance requirements of MEMS beams and trenches are translated into the same set of Process Attributes. This allows for a screening of the Process Chains to obtain a list of candidate manufacturing methods. This method is illustrated in a brief design example.
1039-1050
Quinn, D.J.
b2afa894-b06a-4887-887d-3dbb7cd7e5e7
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Ashby, M.F.
b65c202a-5998-4b80-bb6b-f2ad2d644f58
Fleck, N.A.
0f3592b8-1ecf-4d56-b4cb-d8749bc253b0
2006
Quinn, D.J.
b2afa894-b06a-4887-887d-3dbb7cd7e5e7
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Ashby, M.F.
b65c202a-5998-4b80-bb6b-f2ad2d644f58
Fleck, N.A.
0f3592b8-1ecf-4d56-b4cb-d8749bc253b0
Quinn, D.J., Spearing, S.M., Ashby, M.F. and Fleck, N.A.
(2006)
A systematic approach to process selection in MEMS.
Journal of Microelectromechanical Systems, 15 (5), .
(doi:10.1109/JMEMS.2006.880292).
Abstract
A systematic approach is developed to select manufacturing Process Chains for the generic elements of a MEMS device. A database of MEMS Process Chains and their attendant process attributes is developed from an extensive review of the literature, and used to construct Process Attribute charts. The performance requirements of MEMS beams and trenches are translated into the same set of Process Attributes. This allows for a screening of the Process Chains to obtain a list of candidate manufacturing methods. This method is illustrated in a brief design example.
Text
42962.pdf
- Version of Record
More information
Published date: 2006
Organisations:
Engineering Mats & Surface Engineerg Gp
Identifiers
Local EPrints ID: 42962
URI: http://eprints.soton.ac.uk/id/eprint/42962
ISSN: 1057-7157
PURE UUID: 48d92dfa-cb14-4d5f-9822-eafb08a5920b
Catalogue record
Date deposited: 05 Jan 2007
Last modified: 16 Mar 2024 03:37
Export record
Altmetrics
Contributors
Author:
D.J. Quinn
Author:
M.F. Ashby
Author:
N.A. Fleck
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics
