HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform
HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform
We present interlayer slope waveguides, designed to guide light from one level to another in a multi-layer silicon photonics platform. The waveguide is fabricated from hydrogenated amorphous silicon (a-Si:H) film, deposited using hot-wire chemical vapor deposition (HWCVD) at a temperature of 230°C. The interlayer slope waveguide is comprises of a lower level input waveguide and an upper level output waveguide, connected by a waveguide on a slope, with vertical separation to isolate other crossing waveguides. Measured loss of 0.17 dB/slope was obtained for waveguide dimensions of 600 nm waveguide width (w) and 400 nm core thickness (h) at a wavelength of 1550 nm and for transverse electric (TE) mode polarization.
15735-15749
Petra, Rafidah
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Oo, Swe Zin
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Tarazona, Antulio
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Cernansky, Robert
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Reynolds, Scott A.
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Khokhar, Ali Z.
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Mittal, Vinita
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Thomson, David J.
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Politi, Alberto
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Mashanovich, Goran Z.
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Reed, Graham T.
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Chong, Harold M.H.
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Petra, Rafidah
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Oo, Swe Zin
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Tarazona, Antulio
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Cernansky, Robert
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Reynolds, Scott A.
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Khokhar, Ali Z.
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Mittal, Vinita
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Thomson, David J.
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Politi, Alberto
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Mashanovich, Goran Z.
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Reed, Graham T.
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Chong, Harold M.H.
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Petra, Rafidah, Oo, Swe Zin, Tarazona, Antulio, Cernansky, Robert, Reynolds, Scott A., Khokhar, Ali Z., Mittal, Vinita, Thomson, David J., Politi, Alberto, Mashanovich, Goran Z., Reed, Graham T. and Chong, Harold M.H.
(2019)
HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform.
Optics Express, 27 (11), .
(doi:10.1364/OE.27.015735).
Abstract
We present interlayer slope waveguides, designed to guide light from one level to another in a multi-layer silicon photonics platform. The waveguide is fabricated from hydrogenated amorphous silicon (a-Si:H) film, deposited using hot-wire chemical vapor deposition (HWCVD) at a temperature of 230°C. The interlayer slope waveguide is comprises of a lower level input waveguide and an upper level output waveguide, connected by a waveguide on a slope, with vertical separation to isolate other crossing waveguides. Measured loss of 0.17 dB/slope was obtained for waveguide dimensions of 600 nm waveguide width (w) and 400 nm core thickness (h) at a wavelength of 1550 nm and for transverse electric (TE) mode polarization.
Text
357712 Optics Exp HWCVD multilayer photonics 2019 Rafidah Petra
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Available under License Other.
Text
oe-27-11-15735
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Accepted/In Press date: 1 April 2019
e-pub ahead of print date: 20 May 2019
Identifiers
Local EPrints ID: 430779
URI: http://eprints.soton.ac.uk/id/eprint/430779
ISSN: 1094-4087
PURE UUID: 2d95b5bb-ef90-43c7-a521-8745ec205b79
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Date deposited: 10 May 2019 16:30
Last modified: 29 Oct 2024 02:45
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Contributors
Author:
Rafidah Petra
Author:
Swe Zin Oo
Author:
Antulio Tarazona
Author:
Robert Cernansky
Author:
Scott A. Reynolds
Author:
Ali Z. Khokhar
Author:
Vinita Mittal
Author:
David J. Thomson
Author:
Goran Z. Mashanovich
Author:
Graham T. Reed
Author:
Harold M.H. Chong
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