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HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform

HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform
HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform

We present interlayer slope waveguides, designed to guide light from one level to another in a multi-layer silicon photonics platform. The waveguide is fabricated from hydrogenated amorphous silicon (a-Si:H) film, deposited using hot-wire chemical vapor deposition (HWCVD) at a temperature of 230°C. The interlayer slope waveguide is comprises of a lower level input waveguide and an upper level output waveguide, connected by a waveguide on a slope, with vertical separation to isolate other crossing waveguides. Measured loss of 0.17 dB/slope was obtained for waveguide dimensions of 600 nm waveguide width (w) and 400 nm core thickness (h) at a wavelength of 1550 nm and for transverse electric (TE) mode polarization.

1094-4087
15735-15749
Petra, Rafidah
578011d0-6b70-412e-abb7-d04acce3ac4a
Oo, Swe Zin
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Tarazona, Antulio
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Cernansky, Robert
8ccb162e-f8ee-4209-a5aa-e9a79e80b919
Reynolds, Scott A.
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Khokhar, Ali Z.
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Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Thomson, David J.
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Politi, Alberto
cf75c0a8-d34d-4cbe-b9d5-e408c0edeeec
Mashanovich, Goran Z.
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Reed, Graham T.
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Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Petra, Rafidah
578011d0-6b70-412e-abb7-d04acce3ac4a
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Cernansky, Robert
8ccb162e-f8ee-4209-a5aa-e9a79e80b919
Reynolds, Scott A.
79120bae-f620-433a-9360-71973dbc4222
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Politi, Alberto
cf75c0a8-d34d-4cbe-b9d5-e408c0edeeec
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1

Petra, Rafidah, Oo, Swe Zin, Tarazona, Antulio, Cernansky, Robert, Reynolds, Scott A., Khokhar, Ali Z., Mittal, Vinita, Thomson, David J., Politi, Alberto, Mashanovich, Goran Z., Reed, Graham T. and Chong, Harold M.H. (2019) HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform. Optics Express, 27 (11), 15735-15749. (doi:10.1364/OE.27.015735).

Record type: Article

Abstract

We present interlayer slope waveguides, designed to guide light from one level to another in a multi-layer silicon photonics platform. The waveguide is fabricated from hydrogenated amorphous silicon (a-Si:H) film, deposited using hot-wire chemical vapor deposition (HWCVD) at a temperature of 230°C. The interlayer slope waveguide is comprises of a lower level input waveguide and an upper level output waveguide, connected by a waveguide on a slope, with vertical separation to isolate other crossing waveguides. Measured loss of 0.17 dB/slope was obtained for waveguide dimensions of 600 nm waveguide width (w) and 400 nm core thickness (h) at a wavelength of 1550 nm and for transverse electric (TE) mode polarization.

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357712 Optics Exp HWCVD multilayer photonics 2019 Rafidah Petra - Accepted Manuscript
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More information

Accepted/In Press date: 1 April 2019
e-pub ahead of print date: 20 May 2019

Identifiers

Local EPrints ID: 430779
URI: https://eprints.soton.ac.uk/id/eprint/430779
ISSN: 1094-4087
PURE UUID: 2d95b5bb-ef90-43c7-a521-8745ec205b79
ORCID for Vinita Mittal: ORCID iD orcid.org/0000-0003-4836-5327
ORCID for Alberto Politi: ORCID iD orcid.org/0000-0002-3668-9474
ORCID for Harold M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 10 May 2019 16:30
Last modified: 24 Jul 2019 04:01

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Contributors

Author: Rafidah Petra
Author: Swe Zin Oo
Author: Robert Cernansky
Author: Scott A. Reynolds
Author: Ali Z. Khokhar
Author: Vinita Mittal ORCID iD
Author: Alberto Politi ORCID iD
Author: Graham T. Reed

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