HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform
HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform
We present interlayer slope waveguides, designed to guide light from one level to another in a multi-layer silicon photonics platform. The waveguide is fabricated from hydrogenated amorphous silicon (a-Si:H) film, deposited using hot-wire chemical vapor deposition (HWCVD) at a temperature of 230°C. The interlayer slope waveguide is comprises of a lower level input waveguide and an upper level output waveguide, connected by a waveguide on a slope, with vertical separation to isolate other crossing waveguides. Measured loss of 0.17 dB/slope was obtained for waveguide dimensions of 600 nm waveguide width (w) and 400 nm core thickness (h) at a wavelength of 1550 nm and for transverse electric (TE) mode polarization.
15735-15749
Petra, Rafidah
578011d0-6b70-412e-abb7-d04acce3ac4a
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Cernansky, Robert
8ccb162e-f8ee-4209-a5aa-e9a79e80b919
Reynolds, Scott A.
79120bae-f620-433a-9360-71973dbc4222
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Politi, Alberto
cf75c0a8-d34d-4cbe-b9d5-e408c0edeeec
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Petra, Rafidah
578011d0-6b70-412e-abb7-d04acce3ac4a
Oo, Swe Zin
6495f6da-8f17-4484-98fb-6151b4efbd9a
Tarazona, Antulio
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Cernansky, Robert
8ccb162e-f8ee-4209-a5aa-e9a79e80b919
Reynolds, Scott A.
79120bae-f620-433a-9360-71973dbc4222
Khokhar, Ali Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Mittal, Vinita
fd5ee9dd-7770-416f-8f47-50ca158b39b0
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Politi, Alberto
cf75c0a8-d34d-4cbe-b9d5-e408c0edeeec
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Reed, Graham T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Petra, Rafidah, Oo, Swe Zin, Tarazona, Antulio, Cernansky, Robert, Reynolds, Scott A., Khokhar, Ali Z., Mittal, Vinita, Thomson, David J., Politi, Alberto, Mashanovich, Goran Z., Reed, Graham T. and Chong, Harold M.H.
(2019)
HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform.
Optics Express, 27 (11), .
(doi:10.1364/OE.27.015735).
Abstract
We present interlayer slope waveguides, designed to guide light from one level to another in a multi-layer silicon photonics platform. The waveguide is fabricated from hydrogenated amorphous silicon (a-Si:H) film, deposited using hot-wire chemical vapor deposition (HWCVD) at a temperature of 230°C. The interlayer slope waveguide is comprises of a lower level input waveguide and an upper level output waveguide, connected by a waveguide on a slope, with vertical separation to isolate other crossing waveguides. Measured loss of 0.17 dB/slope was obtained for waveguide dimensions of 600 nm waveguide width (w) and 400 nm core thickness (h) at a wavelength of 1550 nm and for transverse electric (TE) mode polarization.
Text
357712 Optics Exp HWCVD multilayer photonics 2019 Rafidah Petra
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Available under License Other.
Text
oe-27-11-15735
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Accepted/In Press date: 1 April 2019
e-pub ahead of print date: 20 May 2019
Identifiers
Local EPrints ID: 430779
URI: http://eprints.soton.ac.uk/id/eprint/430779
ISSN: 1094-4087
PURE UUID: 2d95b5bb-ef90-43c7-a521-8745ec205b79
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Date deposited: 10 May 2019 16:30
Last modified: 18 Mar 2024 05:23
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Contributors
Author:
Rafidah Petra
Author:
Swe Zin Oo
Author:
Antulio Tarazona
Author:
Robert Cernansky
Author:
Scott A. Reynolds
Author:
Ali Z. Khokhar
Author:
Vinita Mittal
Author:
Harold M.H. Chong
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