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Patterning of worm-like soft polydimethylsiloxane structures using a TiO2 nanotubular array

Patterning of worm-like soft polydimethylsiloxane structures using a TiO2 nanotubular array
Patterning of worm-like soft polydimethylsiloxane structures using a TiO2 nanotubular array
Patterned polydimethylsiloxane (PDMS) is an important structure for soft lithography. Various materials have been deployed as mould for patterning PDMS. Anodised nanotubular array has been sought after as cost-effective alternative for textured silicon. An array of TiO2 nanotubes with characteristic diameter ≈140 nm and the length of ≈1.5 microns, created by anodic oxidation of a titanium substrate, was used here as a template for soft PDMS moulding. The optimal moulding process was developed by a combination of silanisation, use of solvent, application of a vacuum and hydraulic pressing. The silanisation was confirmed by Fourier transform infrared spectroscopy and contact angle measurements while the PDMS structure was examined by scanning electron microscope and energy dispersive X-ray spectroscopy. Hydraulic pressing significantly improved the infiltration of PDMS into the pores of nanotubular array resulting in formation of PDMS nano-bumps after separation of the polymer from the template. Complete infiltration of PDMS precursor into the cavity of nanotubes was observed on the hydraulic-pressed sample without toluene impurities. The hydraulic-pressed samples exhibited higher adhesion strength than non-pressed ones. The adhesive strength was measured by a simple experimental arrangement, in which the PDMS layer was stuck on a vertical glass surface followed by pulling it downwards.
anodising, TiO2 nanotubes, moulding, PDMS, soft lithography
0021-8995
Harito, Christian
d146fa4e-fa33-40fc-b4b2-f4a77e0e75e6
Bavykin, Dmitry
1e9fabfc-d078-4585-876f-85ff33b7eed5
Moshrefi-Torbati, Mohamed
65b351dc-7c2e-4a9a-83a4-df797973913b
Walsh, Frank
309528e7-062e-439b-af40-9309bc91efb2
Islam, A.
b61a9289-c189-455d-bb7b-a1b9994541d6
Yuliarto, Brian
3817e4d8-9d7a-49a5-8a47-2a7dd7a0a9f3
Harito, Christian
d146fa4e-fa33-40fc-b4b2-f4a77e0e75e6
Bavykin, Dmitry
1e9fabfc-d078-4585-876f-85ff33b7eed5
Moshrefi-Torbati, Mohamed
65b351dc-7c2e-4a9a-83a4-df797973913b
Walsh, Frank
309528e7-062e-439b-af40-9309bc91efb2
Islam, A.
b61a9289-c189-455d-bb7b-a1b9994541d6
Yuliarto, Brian
3817e4d8-9d7a-49a5-8a47-2a7dd7a0a9f3

Harito, Christian, Bavykin, Dmitry, Moshrefi-Torbati, Mohamed, Walsh, Frank, Islam, A. and Yuliarto, Brian (2020) Patterning of worm-like soft polydimethylsiloxane structures using a TiO2 nanotubular array. Journal of Applied Polymer Science, 137 (45). (doi:10.1002/app.49795).

Record type: Article

Abstract

Patterned polydimethylsiloxane (PDMS) is an important structure for soft lithography. Various materials have been deployed as mould for patterning PDMS. Anodised nanotubular array has been sought after as cost-effective alternative for textured silicon. An array of TiO2 nanotubes with characteristic diameter ≈140 nm and the length of ≈1.5 microns, created by anodic oxidation of a titanium substrate, was used here as a template for soft PDMS moulding. The optimal moulding process was developed by a combination of silanisation, use of solvent, application of a vacuum and hydraulic pressing. The silanisation was confirmed by Fourier transform infrared spectroscopy and contact angle measurements while the PDMS structure was examined by scanning electron microscope and energy dispersive X-ray spectroscopy. Hydraulic pressing significantly improved the infiltration of PDMS into the pores of nanotubular array resulting in formation of PDMS nano-bumps after separation of the polymer from the template. Complete infiltration of PDMS precursor into the cavity of nanotubes was observed on the hydraulic-pressed sample without toluene impurities. The hydraulic-pressed samples exhibited higher adhesion strength than non-pressed ones. The adhesive strength was measured by a simple experimental arrangement, in which the PDMS layer was stuck on a vertical glass surface followed by pulling it downwards.

Text
Script for Journal of Applied Polymer Sciences - Accepted Manuscript
Restricted to Repository staff only until 18 August 2021.
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More information

e-pub ahead of print date: 14 August 2020
Published date: 18 August 2020
Keywords: anodising, TiO2 nanotubes, moulding, PDMS, soft lithography

Identifiers

Local EPrints ID: 444148
URI: http://eprints.soton.ac.uk/id/eprint/444148
ISSN: 0021-8995
PURE UUID: 141ab0ee-2807-42c7-8bb5-09c74bad9ceb

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Date deposited: 29 Sep 2020 17:33
Last modified: 08 Oct 2020 16:41

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