Analysis of hysteric behaviour in nonlinear resonance of silicon nanoelectromechanical resonators
Analysis of hysteric behaviour in nonlinear resonance of silicon nanoelectromechanical resonators
Highly nonlinear behaviour observed in nano-electromechanical systems (NEMS) has been attracting much attention. In this study, a series of nonlinear hysteric resonance behaviours with respect to actuation voltage, observed in a doubly-clamped NEMS resonator, have been analysed by introducing a threshold determination equation into a model based on Duffing equation. The model is applied for a 1-μm-long resonator with the resonance frequency of up to 221 MHz and shows consistent results for the hysteric behaviour associated with nonlinear resonance , which will be useful for future nonlinear NEMS resonator applications.
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
a97e7403-b5bb-4bc4-9358-a3bf3cfcdcdc
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
20 September 2021
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
a97e7403-b5bb-4bc4-9358-a3bf3cfcdcdc
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Ben, Fang, Fernando, James, Ou, Jun-Yu and Tsuchiya, Yoshishige
(2021)
Analysis of hysteric behaviour in nonlinear resonance of silicon nanoelectromechanical resonators.
47th Micro and Nano Engineering Conference, Turin and Online, Turin, Italy.
20 - 23 Sep 2021.
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Conference or Workshop Item
(Paper)
Abstract
Highly nonlinear behaviour observed in nano-electromechanical systems (NEMS) has been attracting much attention. In this study, a series of nonlinear hysteric resonance behaviours with respect to actuation voltage, observed in a doubly-clamped NEMS resonator, have been analysed by introducing a threshold determination equation into a model based on Duffing equation. The model is applied for a 1-μm-long resonator with the resonance frequency of up to 221 MHz and shows consistent results for the hysteric behaviour associated with nonlinear resonance , which will be useful for future nonlinear NEMS resonator applications.
Text
Analysis_of_Hysteric_Behaviour_in_Nonlinear_Resonance_of_Silicon_Nanoelectromechanical_Resonators-2
- Author's Original
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Published date: 20 September 2021
Venue - Dates:
47th Micro and Nano Engineering Conference, Turin and Online, Turin, Italy, 2021-09-20 - 2021-09-23
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Local EPrints ID: 454511
URI: http://eprints.soton.ac.uk/id/eprint/454511
PURE UUID: fe71d977-fc9b-4264-be10-1955b54dab01
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Date deposited: 14 Feb 2022 17:43
Last modified: 21 Nov 2024 03:09
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