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Analysis of hysteric behaviour in nonlinear resonance of silicon nanoelectromechanical resonators

Analysis of hysteric behaviour in nonlinear resonance of silicon nanoelectromechanical resonators
Analysis of hysteric behaviour in nonlinear resonance of silicon nanoelectromechanical resonators
Highly nonlinear behaviour observed in nano-electromechanical systems (NEMS) has been attracting much attention. In this study, a series of nonlinear hysteric resonance behaviours with respect to actuation voltage, observed in a doubly-clamped NEMS resonator, have been analysed by introducing a threshold determination equation into a model based on Duffing equation. The model is applied for a 1-μm-long resonator with the resonance frequency of up to 221 MHz and shows consistent results for the hysteric behaviour associated with nonlinear resonance , which will be useful for future nonlinear NEMS resonator applications.
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
5e710732-a69b-4ee0-bb61-066aaf5dadea
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
5e710732-a69b-4ee0-bb61-066aaf5dadea
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2

Ben, Fang, Fernando, James, Ou, Jun-Yu and Tsuchiya, Yoshishige (2021) Analysis of hysteric behaviour in nonlinear resonance of silicon nanoelectromechanical resonators. 47th Micro and Nano Engineering Conference, Turin and Online, Turin, Italy. 20 - 23 Sep 2021.

Record type: Conference or Workshop Item (Paper)

Abstract

Highly nonlinear behaviour observed in nano-electromechanical systems (NEMS) has been attracting much attention. In this study, a series of nonlinear hysteric resonance behaviours with respect to actuation voltage, observed in a doubly-clamped NEMS resonator, have been analysed by introducing a threshold determination equation into a model based on Duffing equation. The model is applied for a 1-μm-long resonator with the resonance frequency of up to 221 MHz and shows consistent results for the hysteric behaviour associated with nonlinear resonance , which will be useful for future nonlinear NEMS resonator applications.

Text
Analysis_of_Hysteric_Behaviour_in_Nonlinear_Resonance_of_Silicon_Nanoelectromechanical_Resonators-2 - Author's Original
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Published date: 20 September 2021
Venue - Dates: 47th Micro and Nano Engineering Conference, Turin and Online, Turin, Italy, 2021-09-20 - 2021-09-23

Identifiers

Local EPrints ID: 454511
URI: http://eprints.soton.ac.uk/id/eprint/454511
PURE UUID: fe71d977-fc9b-4264-be10-1955b54dab01
ORCID for Fang Ben: ORCID iD orcid.org/0000-0002-8486-5583
ORCID for James Fernando: ORCID iD orcid.org/0000-0002-2526-8455
ORCID for Jun-Yu Ou: ORCID iD orcid.org/0000-0001-8028-6130

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Date deposited: 14 Feb 2022 17:43
Last modified: 21 Jun 2022 01:53

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Contributors

Author: Fang Ben ORCID iD
Author: James Fernando ORCID iD
Author: Jun-Yu Ou ORCID iD
Author: Yoshishige Tsuchiya

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