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Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators

Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators
Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators

This paper reports a novel method to build a model for nonlinear resonance behaviour of very-high-frequency (VHF) silicon nanoelectromechanical (NEM) resonators, measured via 1-ω mixing resonance measurements. Systematic fitting results for the experimental data of a 1.5-μm-long beams have been achieved with explicit explanation of the amount of intrinsic mechanical nonlinearity and nonlinear voltage-tuning effect. Asymmetric line shape and onset of hysteresis on nonliner resonance behavour have been well demonstrated with less fitting errors. The development of a modelling method of nanoscale resonator devices which includes nonlinear response is beneficial for seamless technology transfer from individual devices to integrated systems in the future.

duffing oscillator equation, mixing measurement, nanoelectromechanical (NEM) systems, nonlinear resonance, Nanoelectromechanical systems, Nonlinear resonance, Mixing measurements, Duffing oscillator equation
2590-0072
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
5e710732-a69b-4ee0-bb61-066aaf5dadea
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Dupré, Cecilia
87ef38a0-96df-4613-9875-8facf55d7102
Ollier, Eric
9bb3a51a-1328-492d-b5d9-5c2829160327
Hassani, Faezeh Arab
42604e56-f14a-447d-ab13-798ae2c337f2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Ben, Fang
9e86862a-4dff-42d1-91f2-b799c1b4bd65
Fernando, James
5e710732-a69b-4ee0-bb61-066aaf5dadea
Ou, Jun-Yu
3fb703e3-b222-46d2-b4ee-75f296d9d64d
Dupré, Cecilia
87ef38a0-96df-4613-9875-8facf55d7102
Ollier, Eric
9bb3a51a-1328-492d-b5d9-5c2829160327
Hassani, Faezeh Arab
42604e56-f14a-447d-ab13-798ae2c337f2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2

Ben, Fang, Fernando, James, Ou, Jun-Yu, Dupré, Cecilia, Ollier, Eric, Hassani, Faezeh Arab, Mizuta, Hiroshi and Tsuchiya, Yoshishige (2023) Characterisation and modelling of nonlinear resonance behaviour on very-high-frequency silicon nanoelectromechanical resonators. Micro and Nano Engineering, 19, [100212]. (doi:10.1016/j.mne.2023.100212).

Record type: Article

Abstract

This paper reports a novel method to build a model for nonlinear resonance behaviour of very-high-frequency (VHF) silicon nanoelectromechanical (NEM) resonators, measured via 1-ω mixing resonance measurements. Systematic fitting results for the experimental data of a 1.5-μm-long beams have been achieved with explicit explanation of the amount of intrinsic mechanical nonlinearity and nonlinear voltage-tuning effect. Asymmetric line shape and onset of hysteresis on nonliner resonance behavour have been well demonstrated with less fitting errors. The development of a modelling method of nanoscale resonator devices which includes nonlinear response is beneficial for seamless technology transfer from individual devices to integrated systems in the future.

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Accepted/In Press date: 22 May 2023
e-pub ahead of print date: 23 May 2023
Published date: June 2023
Additional Information: Funding Information: This work was partially supported by the EU FP7-ICT project NEMSIC [grant number 224525 ] and the CHIST-ERA grant NOEMIA [CHIST-ERA-21-NOEMS-004] by the Engineering and Physical Sciences Research Council [grant number EP/X03495X/1 ]. Publisher Copyright: © 2023
Keywords: duffing oscillator equation, mixing measurement, nanoelectromechanical (NEM) systems, nonlinear resonance, Nanoelectromechanical systems, Nonlinear resonance, Mixing measurements, Duffing oscillator equation
Learn more about School of Electronics and Computer Science research Learn more about Smart Electronic Materials and Systems research

Identifiers

Local EPrints ID: 477413
URI: http://eprints.soton.ac.uk/id/eprint/477413
DOI: doi:10.1016/j.mne.2023.100212
ISSN: 2590-0072
PURE UUID: 0fea8ce4-1435-4beb-812c-c25ca73c773b
ORCID for Fang Ben: ORCID iD orcid.org/0000-0002-8486-5583
ORCID for James Fernando: ORCID iD orcid.org/0000-0002-2526-8455
ORCID for Jun-Yu Ou: ORCID iD orcid.org/0000-0001-8028-6130

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Date deposited: 06 Jun 2023 16:52
Last modified: 17 Mar 2024 03:53

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Contributors

Author: Fang Ben ORCID iD
Author: James Fernando ORCID iD
Author: Jun-Yu Ou ORCID iD
Author: Cecilia Dupré
Author: Eric Ollier
Author: Faezeh Arab Hassani
Author: Hiroshi Mizuta
Author: Yoshishige Tsuchiya

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