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Ductile dicing for optical facets and waveguides in silicon nitride

Ductile dicing for optical facets and waveguides in silicon nitride
Ductile dicing for optical facets and waveguides in silicon nitride
ultra-precision machining, Photonics, Silicon Nitride, Waveguide, Facet Analysis, surface profilometry
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Vitali, Valerio
4a0d9710-5d64-4703-9554-86d71c4cb0f5
Domínguez Bucio‬, Thalía
83b57799-c566-473c-9b53-92e9c50b4287
Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Gawith, Corin
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Vitali, Valerio
4a0d9710-5d64-4703-9554-86d71c4cb0f5
Domínguez Bucio‬, Thalía
83b57799-c566-473c-9b53-92e9c50b4287
Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Gawith, Corin
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2

Gow, Paul C., Churchill, Glenn, Vitali, Valerio, Domínguez Bucio‬, Thalía, Petropoulos, Periklis, Gardes, Frederic, Gawith, Corin and Gates, James C. (2023) Ductile dicing for optical facets and waveguides in silicon nitride. 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, International Congress Centre Munich, Munich, Germany. 26 - 30 Jun 2023. 1 pp .

Record type: Conference or Workshop Item (Other)
Text
SiN waveguide facet cuts - Accepted Manuscript
Available under License Creative Commons Attribution No Derivatives.
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Published date: 26 June 2023
Venue - Dates: 2023 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, International Congress Centre Munich, Munich, Germany, 2023-06-26 - 2023-06-30
Keywords: ultra-precision machining, Photonics, Silicon Nitride, Waveguide, Facet Analysis, surface profilometry
Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Zepler Institute for Photonics and Nanoelectronics research

Identifiers

Local EPrints ID: 478821
URI: http://eprints.soton.ac.uk/id/eprint/478821
PURE UUID: c73b161f-c545-4cff-a4c9-868495872061
ORCID for Paul C. Gow: ORCID iD orcid.org/0000-0002-3247-9082
ORCID for Glenn Churchill: ORCID iD orcid.org/0000-0001-7621-7618
ORCID for Thalía Domínguez Bucio‬: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for Periklis Petropoulos: ORCID iD orcid.org/0000-0002-1576-8034
ORCID for Frederic Gardes: ORCID iD orcid.org/0000-0003-1400-3272
ORCID for Corin Gawith: ORCID iD orcid.org/0000-0002-3502-3558
ORCID for James C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 11 Jul 2023 16:53
Last modified: 16 Apr 2024 01:55

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Contributors

Author: Paul C. Gow ORCID iD
Author: Glenn Churchill ORCID iD
Author: Valerio Vitali
Author: Thalía Domínguez Bucio‬ ORCID iD
Author: Periklis Petropoulos ORCID iD
Author: Frederic Gardes ORCID iD
Author: Corin Gawith ORCID iD
Author: James C. Gates ORCID iD

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