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Dataset supporting the publication: 'Large-area synthesis of high electrical performance MoS2 by a commercially scalable atomic layer deposition process'

Dataset supporting the publication: 'Large-area synthesis of high electrical performance MoS2 by a commercially scalable atomic layer deposition process'
Dataset supporting the publication: 'Large-area synthesis of high electrical performance MoS2 by a commercially scalable atomic layer deposition process'
The dataset supports the publication: Large-area synthesis of high electrical performance MoS2 by a commercially scalable atomic layer deposition process'. Published in npj 2D Materials and Applications The dataset includes the results from ellipsometry, XPS, AFM, Raman and electrical characterisation of the films and devices demonstrated in this work.
2D Materials, MoS2, ALD, Atomic layer deposition, FET, Fe-FET
University of Southampton
Aspiotis, Nikolaos
ce70e544-cfad-4d4f-86b3-d41d43d036cd
Morgan, Katrina
2b9605fc-ac61-4ae7-b5f1-b6e3d257701d
März, Benjamin
3db56567-9950-4328-8bd7-81b091e9ff62
Müller-Caspary, Knut
5e862f46-cbeb-448c-a87a-9e8804edd4c4
Ebert, Martin
1a8f1756-d724-4b44-8504-c01f8dc7aa50
Huang, Kevin Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0
Majumdar, Sayani
7a50c015-9753-49ea-a554-857d92340189
Zeimpekis-Karakonstantinos, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Aspiotis, Nikolaos
ce70e544-cfad-4d4f-86b3-d41d43d036cd
Morgan, Katrina
2b9605fc-ac61-4ae7-b5f1-b6e3d257701d
März, Benjamin
3db56567-9950-4328-8bd7-81b091e9ff62
Müller-Caspary, Knut
5e862f46-cbeb-448c-a87a-9e8804edd4c4
Ebert, Martin
1a8f1756-d724-4b44-8504-c01f8dc7aa50
Huang, Kevin Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0
Majumdar, Sayani
7a50c015-9753-49ea-a554-857d92340189
Zeimpekis-Karakonstantinos, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0

Aspiotis, Nikolaos, Morgan, Katrina, Hewak, Daniel, Majumdar, Sayani and Zeimpekis-Karakonstantinos, Ioannis (2024) Dataset supporting the publication: 'Large-area synthesis of high electrical performance MoS2 by a commercially scalable atomic layer deposition process'. University of Southampton doi:10.5258/SOTON/D2156 [Dataset]

Record type: Dataset

Abstract

The dataset supports the publication: Large-area synthesis of high electrical performance MoS2 by a commercially scalable atomic layer deposition process'. Published in npj 2D Materials and Applications The dataset includes the results from ellipsometry, XPS, AFM, Raman and electrical characterisation of the films and devices demonstrated in this work.

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README.txt - Dataset
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Figure_1a.xlsx - Dataset
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Figure_1b.xlsx - Dataset
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Figure_1c.xlsx - Dataset
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Figure_2_a_and_b_MoO3.xlsx - Dataset
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Figure_2_c_and_d_MoS2.xlsx - Dataset
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Figure_3b.xlsx - Dataset
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Figure_5a.xlsx - Dataset
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Figure_5b.xlsx - Dataset
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Figure_7.xlsx - Dataset
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Figure_8.xlsx - Dataset
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Figure_3a_BP2_PP_Sap_191007_Topography_Forward_019_copy.tiff - Dataset
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More information

Published date: October 2024
Related URLs:
Keywords: 2D Materials, MoS2, ALD, Atomic layer deposition, FET, Fe-FET
Learn more about Zepler Institute for Photonics and Nanoelectronics research Learn more about Zepler Institute for Photonics and Nanoelectronics research

Identifiers

Local EPrints ID: 494935
URI: http://eprints.soton.ac.uk/id/eprint/494935
DOI: doi:10.5258/SOTON/D2156
PURE UUID: 335aec1d-e498-4437-abeb-3fbe110b4930
ORCID for Katrina Morgan: ORCID iD orcid.org/0000-0002-8600-4322
ORCID for Kevin Chung-Che Huang: ORCID iD orcid.org/0000-0003-3471-2463
ORCID for Daniel Hewak: ORCID iD orcid.org/0000-0002-2093-5773
ORCID for Ioannis Zeimpekis-Karakonstantinos: ORCID iD orcid.org/0000-0002-7455-1599

Catalogue record

Date deposited: 23 Oct 2024 16:53
Last modified: 25 Oct 2024 01:43

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Contributors

Creator: Nikolaos Aspiotis
Creator: Katrina Morgan ORCID iD
Contributor: Benjamin März
Contributor: Knut Müller-Caspary
Contributor: Martin Ebert
Contributor: Kevin Chung-Che Huang ORCID iD
Creator: Daniel Hewak ORCID iD
Creator: Sayani Majumdar
Creator: Ioannis Zeimpekis-Karakonstantinos ORCID iD

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