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Towards precise trimming and programming of photonic integrated circuits

Towards precise trimming and programming of photonic integrated circuits
Towards precise trimming and programming of photonic integrated circuits
Methods to achieve a high-resolution phase trimming within silicon waveguides incorporating Ge implanted sections are investigated. The trimming is performed electrically using on-chip microheaters. The average resolution of phase change per voltage pulse achieved by this work was approximately 0.0007π radians.
CMOS compatible, ion implantation, phase trimming, phase tuning, post-fabrication trimming, programmable
1949-2081
IEEE
Logan, April M.
e8358307-2b35-4326-bc11-3800a5b82a28
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Yu, Xingshi
a368e8ff-5e3d-4538-8166-aa0011812bd0
Shen, Weihong
2facca30-447b-4303-9e4c-5f19abf1e3d7
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda
Logan, April M.
e8358307-2b35-4326-bc11-3800a5b82a28
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Yu, Xingshi
a368e8ff-5e3d-4538-8166-aa0011812bd0
Shen, Weihong
2facca30-447b-4303-9e4c-5f19abf1e3d7
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Thomson, David J.
17c1626c-2422-42c6-98e0-586ae220bcda

Logan, April M., Chen, Xia, Yu, Xingshi, Shen, Weihong, Yan, Xingzhao, Zhang, Weiwei, Mashanovich, Goran Z., Reed, Graham and Thomson, David J. (2025) Towards precise trimming and programming of photonic integrated circuits. In 2025 IEEE Silicon Photonics Conference, SiPhotonics 2025. IEEE. 2 pp . (doi:10.1109/SiPhotonics64386.2025.10984480).

Record type: Conference or Workshop Item (Paper)

Abstract

Methods to achieve a high-resolution phase trimming within silicon waveguides incorporating Ge implanted sections are investigated. The trimming is performed electrically using on-chip microheaters. The average resolution of phase change per voltage pulse achieved by this work was approximately 0.0007π radians.

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Towards precise trimming and programming of photonic integrated circuits - Accepted Manuscript
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Published date: 12 May 2025
Keywords: CMOS compatible, ion implantation, phase trimming, phase tuning, post-fabrication trimming, programmable
Learn more about Zepler Institute for Photonics and Nanoelectronics research

Identifiers

Local EPrints ID: 502576
URI: http://eprints.soton.ac.uk/id/eprint/502576
DOI: doi:10.1109/SiPhotonics64386.2025.10984480
ISSN: 1949-2081
PURE UUID: e16989b6-758b-4665-9a67-ce72b8fb8fd8
ORCID for April M. Logan: ORCID iD orcid.org/0000-0002-5759-3965
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Goran Z. Mashanovich: ORCID iD orcid.org/0000-0003-2954-5138
ORCID for Graham Reed: ORCID iD orcid.org/0009-0002-5314-6604

Catalogue record

Date deposited: 01 Jul 2025 16:37
Last modified: 03 Jul 2025 02:34

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Contributors

Author: April M. Logan ORCID iD
Author: Xia Chen ORCID iD
Author: Xingshi Yu
Author: Weihong Shen
Author: Xingzhao Yan
Author: Weiwei Zhang
Author: Goran Z. Mashanovich ORCID iD
Author: Graham Reed ORCID iD
Author: David J. Thomson

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