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Nanofabrication of monolithically integrated multilayer metasurfaces via fully CMOS-compatible processes

Nanofabrication of monolithically integrated multilayer metasurfaces via fully CMOS-compatible processes
Nanofabrication of monolithically integrated multilayer metasurfaces via fully CMOS-compatible processes
We have developed a novel metasurface stacking methodology that is fully compatible with standard Complementary Metal-Oxide-Semiconductor（CMOS） processes, advancing the mass production and commercialization of metasurface technologies.
Ye, Yuntian
e8ac8a15-9778-43e1-a70b-7ff81317d544
Peng, Hao
d0443f9c-64a4-486e-acdb-3175e3054648
Yin, Shengqi
5182f6f3-d23f-475b-b6cd-11c32af7aa38
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Fang, Xu
96b4b212-496b-4d68-82a4-06df70f94a86
Ye, Yuntian
e8ac8a15-9778-43e1-a70b-7ff81317d544
Peng, Hao
d0443f9c-64a4-486e-acdb-3175e3054648
Yin, Shengqi
5182f6f3-d23f-475b-b6cd-11c32af7aa38
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Fang, Xu
96b4b212-496b-4d68-82a4-06df70f94a86

Ye, Yuntian, Peng, Hao, Yin, Shengqi, Yan, Jize, Kiang, Kian Shen and Fang, Xu (2025) Nanofabrication of monolithically integrated multilayer metasurfaces via fully CMOS-compatible processes. 51st International Micro and<br/>Nano Engineering Conference, NOCS, Southampton, United Kingdom. 15 - 18 Sep 2025. 2 pp .

Record type: Conference or Workshop Item (Poster)

Abstract

We have developed a novel metasurface stacking methodology that is fully compatible with standard Complementary Metal-Oxide-Semiconductor（CMOS） processes, advancing the mass production and commercialization of metasurface technologies.

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Nanofabrication of monolithically integrated multilayer metasurfaces via fully CMOS-compatible processes - Accepted Manuscript
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More information

Published date: 15 September 2025
Venue - Dates: 51st International Micro and<br/>Nano Engineering Conference, NOCS, Southampton, United Kingdom, 2025-09-15 - 2025-09-18
Related URLs:
Learn more about Institute for Life Sciences research Learn more about School of Electronics and Computer Science research Learn more about Smart Electronic Materials and Systems research Learn more about Sustainable Electronic Technologies research

Identifiers

Local EPrints ID: 507296
URI: http://eprints.soton.ac.uk/id/eprint/507296
PURE UUID: 19897b7a-ccaf-4058-9a36-12514670ac5f
ORCID for Jize Yan: ORCID iD orcid.org/0000-0002-2886-2847
ORCID for Kian Shen Kiang: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for Xu Fang: ORCID iD orcid.org/0000-0003-1735-2654

Catalogue record

Date deposited: 03 Dec 2025 17:35
Last modified: 04 Dec 2025 02:45

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Contributors

Author: Yuntian Ye
Author: Hao Peng
Author: Shengqi Yin
Author: Jize Yan ORCID iD
Author: Kian Shen Kiang ORCID iD
Author: Xu Fang ORCID iD

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