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Data associated with a doctoral thesis titled: An investigation into low-power micro/nano-electro-mechanical (M/NEM) switch devices for internet of things (IoT) power delivery applications using silicon structures and titanium nitride (TiN) contacts

Data associated with a doctoral thesis titled: An investigation into low-power micro/nano-electro-mechanical (M/NEM) switch devices for internet of things (IoT) power delivery applications using silicon structures and titanium nitride (TiN) contacts
Data associated with a doctoral thesis titled: An investigation into low-power micro/nano-electro-mechanical (M/NEM) switch devices for internet of things (IoT) power delivery applications using silicon structures and titanium nitride (TiN) contacts
The simulation and raw experimental data associated with the following. An investigation into low-power micro/nano-electro-mechanical (M/NEM) switch devices for internet of things (IoT) power delivery applications using silicon structures and titanium nitride (TiN) contacts
MEMS, CONTACT, SWITCH
University of Southampton
McCarthy, Marlon Elijah
904807fe-724f-4341-8505-6e0274dab9b4
McCarthy, Marlon Elijah
904807fe-724f-4341-8505-6e0274dab9b4

McCarthy, Marlon Elijah (2025) Data associated with a doctoral thesis titled: An investigation into low-power micro/nano-electro-mechanical (M/NEM) switch devices for internet of things (IoT) power delivery applications using silicon structures and titanium nitride (TiN) contacts. University of Southampton doi:10.5258/SOTON/D3772 [Dataset]

Record type: Dataset

Abstract

The simulation and raw experimental data associated with the following. An investigation into low-power micro/nano-electro-mechanical (M/NEM) switch devices for internet of things (IoT) power delivery applications using silicon structures and titanium nitride (TiN) contacts

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More information

Published date: 2025
Keywords: MEMS, CONTACT, SWITCH

Identifiers

Local EPrints ID: 510255
URI: http://eprints.soton.ac.uk/id/eprint/510255
PURE UUID: f9c892af-b88b-4d62-a8bd-48b9351630fe
ORCID for Marlon Elijah McCarthy: ORCID iD orcid.org/0000-0002-4462-5227

Catalogue record

Date deposited: 24 Mar 2026 17:47
Last modified: 25 Mar 2026 03:00

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Contributors

Creator: Marlon Elijah McCarthy ORCID iD

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