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Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications

Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications
Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications
Data supporting the paper Dominguez Bucio, Thalia, Khokhar, Ali and Lacava, Cosimo et al. (2016) Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications. Journal of Physics D: Applied Physics DOI:10.1088/1361-6463/50/2/025106
University of Southampton
Dominguez Bucio, Thalia
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Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Lacava, Cosimo
a0a31a27-23ac-4a73-8bb4-2f02368fb8bd
Stankovic, Stevan
13e8c464-b876-405a-b442-7c437a6eafd3
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2
Dominguez Bucio, Thalia
83b57799-c566-473c-9b53-92e9c50b4287
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Lacava, Cosimo
a0a31a27-23ac-4a73-8bb4-2f02368fb8bd
Stankovic, Stevan
13e8c464-b876-405a-b442-7c437a6eafd3
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Petropoulos, Periklis
522b02cc-9f3f-468e-bca5-e9f58cc9cad7
Gardes, Frederic
7a49fc6d-dade-4099-b016-c60737cb5bb2

Dominguez Bucio, Thalia, Khokhar, Ali, Lacava, Cosimo, Stankovic, Stevan, Mashanovich, Goran, Petropoulos, Periklis and Gardes, Frederic (2017) Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications. University of Southampton doi:10.5258/SOTON/403100 [Dataset]

Record type: Dataset

Abstract

Data supporting the paper Dominguez Bucio, Thalia, Khokhar, Ali and Lacava, Cosimo et al. (2016) Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications. Journal of Physics D: Applied Physics DOI:10.1088/1361-6463/50/2/025106

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More information

Published date: 2017
Related URLs:
Organisations: Optoelectronics Research Centre, ORC Research, Photonic Systems Circuits & Sensors
Projects:
Electronic-Photonic Convergence: A Platform Grant
Funded by: UNSPECIFIED (EP/N013247/1)
1 April 2016 to 31 March 2021
CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing
Funded by: UNSPECIFIED (EP/L021129/1)
15 September 2014 to 14 September 2018
HERMES: High dEnsity Silicon GeRManium intEgrated photonicS
Funded by: UNSPECIFIED (EP/K02423X/1)
26 June 2013 to 25 June 2015
Learn more about Optoelectronics Research Centre research

Identifiers

Local EPrints ID: 403100
URI: http://eprints.soton.ac.uk/id/eprint/403100
DOI: doi:10.5258/SOTON/403100
PURE UUID: 171acd64-f0cf-477f-805e-e0e4e3285ba0
ORCID for Thalia Dominguez Bucio: ORCID iD orcid.org/0000-0002-3664-1403
ORCID for Cosimo Lacava: ORCID iD orcid.org/0000-0002-9950-8642
ORCID for Stevan Stankovic: ORCID iD orcid.org/0000-0001-6154-3138
ORCID for Periklis Petropoulos: ORCID iD orcid.org/0000-0002-1576-8034
ORCID for Frederic Gardes: ORCID iD orcid.org/0000-0003-1400-3272

Catalogue record

Date deposited: 25 Nov 2016 10:15
Last modified: 05 Nov 2023 02:57

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Contributors

Creator: Thalia Dominguez Bucio ORCID iD
Creator: Ali Khokhar
Creator: Cosimo Lacava ORCID iD
Creator: Stevan Stankovic ORCID iD
Creator: Goran Mashanovich
Creator: Periklis Petropoulos ORCID iD
Creator: Frederic Gardes ORCID iD

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