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Dataset for: Post-fabrication Phase Trimming of Mach-Zehnder Interferometers by Laser Annealing of Germanium Implanted Waveguides

Dataset for: Post-fabrication Phase Trimming of Mach-Zehnder Interferometers by Laser Annealing of Germanium Implanted Waveguides
Dataset for: Post-fabrication Phase Trimming of Mach-Zehnder Interferometers by Laser Annealing of Germanium Implanted Waveguides
Dataset supports: Chen, X. et al (2017). Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides. Paper presented at 2017 IEEE 14th International Conference on Group IV Photonics (GFP), Berlin.We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control.
silicon photonics
University of Southampton
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milosevic, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Milosevic, Milan
b28da945-84a5-4317-8896-6d9ea6a69589
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Franz, Yohann
edb6208c-9f65-42c4-965e-b6bc54945602
Runge, Antoine
874cec37-209b-4c7a-97a5-56d05596dd2b
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Peacock, Anna
685d924c-ef6b-401b-a0bd-acf1f8e758fc
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139

Chen, Xia, Milosevic, Milan, Thomson, David, Khokhar, Ali, Franz, Yohann, Runge, Antoine, Mailis, Sakellaris, Peacock, Anna and Reed, Graham (2017) Dataset for: Post-fabrication Phase Trimming of Mach-Zehnder Interferometers by Laser Annealing of Germanium Implanted Waveguides. University of Southampton doi:10.5258/SOTON/D0167 [Dataset]

Record type: Dataset

Abstract

Dataset supports: Chen, X. et al (2017). Phase trimming of Mach-Zehnder Interferometers by laser annealing of germanium implanted waveguides. Paper presented at 2017 IEEE 14th International Conference on Group IV Photonics (GFP), Berlin.We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder Interferometers (MZIs), enabling permanent correction of typical fabrication based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control.

Other
Data_MZI_laser_annealing_1.xlsx - Dataset
Available under License Creative Commons Attribution.
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More information

Published date: 12 July 2017
Keywords: silicon photonics
Organisations: ORC Research, Optoelectronics Research Centre, Photonic Systems Circuits & Sensors

Identifiers

Local EPrints ID: 412668
URI: https://eprints.soton.ac.uk/id/eprint/412668
PURE UUID: 141af8b5-628d-4788-b637-0078e1c4a188
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for Anna Peacock: ORCID iD orcid.org/0000-0002-1940-7172

Catalogue record

Date deposited: 24 Jul 2017 16:45
Last modified: 06 Jun 2018 12:56

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Contributors

Creator: Xia Chen ORCID iD
Creator: Milan Milosevic
Creator: David Thomson
Creator: Ali Khokhar
Creator: Yohann Franz
Creator: Antoine Runge
Creator: Anna Peacock ORCID iD
Creator: Graham Reed

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